Micro-resistance measurement equipment and measurement method
A technology of resistance measurement and micro-resistance, applied in the direction of measuring electrical variables, parts of electrical measuring instruments, measuring electricity, etc., can solve the problems of the influence of the measured resistance value, difficulty in controlling the pressure of the probe, and inaccurate position selection, etc., to achieve Realize the effect of measurement, reduce operation complexity, and measure accurately
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[0046] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0047] In order to achieve the object of the present invention, in some embodiments of a resistance measuring device and a measuring method,
[0048] Such as figure 1 and 2 As shown, a resistance measuring device, the resistance measuring device includes: a sliding platform 1, a control device, a micro-resistance tester 2 that is arranged on the sliding platform 1 and can move in three directions along the XYZ axis, and a carrier for carrying or transporting products. Tool 3, temperature sensor 4 and zero adjustment motherboard 5; micro-resistance tester 2 is provided with a group of four probes 21; carrier 3 is arranged on the sliding platform 1; temperature sensor (not shown in the figure) and control device Electrical connection; the zeroing motherboard 4 is used for zeroing the micro-resistance tester 2 .
[0049] The sliding platform ...
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