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Chip of angular velocity sensor of double-ended tuning fork

An angular velocity sensor and double-ended tuning fork technology, applied in the field of inertial sensing, can solve the problems of limiting the improvement of chip sensitivity and low electric field excitation efficiency, and achieve the effect of high chip sensitivity and high electric field strength

Active Publication Date: 2016-03-23
CHINA ELECTRONICS TECH GRP NO 26 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing double-ended tuning fork quartz micromechanical gyroscope chip driving tuning fork has a rectangular structure, and the electric field excitation efficiency is low, which limits the improvement of chip sensitivity.

Method used

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  • Chip of angular velocity sensor of double-ended tuning fork
  • Chip of angular velocity sensor of double-ended tuning fork
  • Chip of angular velocity sensor of double-ended tuning fork

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] figure 1 It is a structural schematic diagram of a double-ended tuning fork angular velocity sensor chip using Embodiment 1 of the present invention. figure 2 yes figure 1 A-A sectional view of ; image 3 yes figure 1 The B-B sectional view of; Figure 4 yes figure 1 C-C section view. Such as Figure 1-Figure 4 As shown: the double-ended tuning fork angular velocity sensor chip 1 provided by the present invention includes two driving beams 2 , two detecting beams 3 , an intermediate block 4 , two fixing blocks 5 and two connecting bridges 6 . The length directions of the drive beam 2 and the detection beam 3 are both arranged along the Y direction and located on the same plane. One ends of the two driving beams 2 are respectively connected to the same side of the middle block 4 (that is, the same side in the Y direction), and one ends of the two detection beams 3 are respectively connected to the other side of the middle block 4 opposite to the driving beam (tha...

Embodiment 2

[0030] Such as Figure 5 As shown, the double-ended tuning fork angular velocity sensor chip of this embodiment is similar in structure to the double-ended tuning fork angular velocity sensor chip of embodiment 1, the difference is that the groove structure on the surface of the driving beam 2 is W-shaped. To highlight the shape of the cross-section, Figure 5 Electrodes are not shown.

[0031] Due to the anisotropic characteristics of the quartz crystal, the groove 11 on the surface of the driving beam 2 in embodiment 1 is etched and its cross-section is non-ideal rectangle, and the side walls are formed by connecting multiple crystal planes with a certain angle with the Z direction. As a result, the electric field intensity at the left and right ends of the drive beam 3 becomes weaker. In this embodiment, the groove 11 is composed of deep grooves 11b parallel on both sides and a shallow groove 11a located between the two deep grooves 11b and connected to the two deep groov...

Embodiment 3

[0033] Such as Figure 6 As shown, the double-terminal tuning fork angular velocity sensor chip of this embodiment is similar in structure to the double-terminal tuning fork angular velocity sensor chip of embodiment 2, the difference is that the driving beam 2 is only provided with grooves on one of the front and back sides. To highlight the shape of the surface grooves, Figure 6 Electrodes are not shown.

[0034]For the thinner driving beam 2, when grooves are made on both sides at the same time, the deep groove 11b is easy to etch through, which reduces the dynamic strength and reliability of the driving beam 2, and at the same time, the dynamic impedance of the driving beam 2 will increase when it resonates. Large, reducing the stability of the double-ended tuning fork angular velocity sensor chip 1. The structure of the drive beam 2 with grooves formed on one side in this embodiment is more suitable for the manufacture of a miniaturized double-ended tuning fork angular...

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PUM

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Abstract

The invention discloses a chip of an angular velocity sensor of a double-ended tuning fork. The length directions of driving beams and detecting beams are arranged along the Y direction, and the driving beams and the detecting beam are located in a same plane; one end of each of the two driving beams is connected with one same side of a middle block, one end of each of the two detecting beams is connected with the other side of the middle block. One end of each of two connecting bridges is connected with each of the two sides in the X direction of the middle block, and the other end of each of the two connecting bridges is connected with a fixed block. At least one of the front surface and the back surface of each of the driving beams is provided with a groove along the length direction, the opening direction of the groove is vertical to the vibrating direction of the driving beams, and the inner walls of the grooves and the two side walls of the driving beams are respectively covered with electrodes used for connecting an excitation power supply. The side walls of the detecting beams are covered with sensitive electrodes separated from each other in parallel. According to the chip, under the equal excitation voltage, the electric field intensity in the tuning fork and the excitation amplitude of the tuning fork are higher, the Coriolis force casued by the same angular velocity is greater, and the sensitivity of the chip is higher.

Description

technical field [0001] The invention relates to angular velocity detection technology, in particular to a double-ended tuning fork angular velocity sensor chip, which belongs to the technical field of inertial sensing. Background technique [0002] The angular velocity sensor is a kind of inertial sensor, which has both military and civilian uses. Micro-mechanical gyroscopes based on MEMS (micro-electro-mechanical systems) technology have unique advantages such as small size, low cost, high reliability, and suitable for mass production. strict field. Silicon micromechanical gyroscopes and quartz micromechanical gyroscopes are the most common and the most researched types of microgyroscopes in the world. Both have their own characteristics and are developing in parallel in the military and civilian fields. [0003] The tuning fork structure is a commonly used quartz micromechanical gyro chip structure. There are two types of single-ended tuning fork and double-ended tunin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5747
CPCG01C19/5747
Inventor 林丙涛蒋昭兴翁邦英
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST