Semiconductor laser chip testing and fixing device and method thereof
A chip testing and fixing device technology, which is applied in the direction of single semiconductor device testing, measuring devices, instruments, etc., can solve problems such as unfavorable manufacturing, uneven force and heat dissipation, complex mechanical structure of the testing device, etc., to achieve improved uniformity, increased Large contact surface area, improve the effect of heat dissipation
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[0042] Such as Figure 4 As shown, the semiconductor laser chip testing and fixing device of the present invention includes a chip carrier platform, a vacuum adsorption device and a temperature control device (TEC), and adopts an adsorption method to fix the chip. The upper surface of the chip carrier platform is provided with discrete P-side power supply electrodes and electrode connectors, and the vacuum adsorption device is connected with a vacuum pump. The difference between the present invention and the prior art mainly lies in:
[0043] 1. The adsorption methods are different. The vacuum adsorption hole of the present invention is parallel to the resonant cavity and perpendicular to the cavity surface.
[0044]2. Different ways of contact. In the present invention, the electrode on the P surface of the chip is in complete contact with the power supply electrode on the P surface, and the force on the P surface is uniform and the heat conduction is uniform. The N-side e...
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