Double-cavity plasma microwave resonant cavity

Abstract

The invention relates to a double-cavity plasma microwave resonant cavity. The resonant cavity comprises resonant cavity casings and a waveguide assembly connected with the resonant cavity casings. The resonant cavity is characterized in that the two resonant cavity casings which are symmetrical in a front-and-back manner and have parallel axes are arranged, the waveguide assembly is mounted on one side between the two parallel resonant cavity casings along the vertical center line, the front end of the waveguide assembly is connected with the two resonant cavity casings through a dichotomy power meter, and microwave source powder is equally divided into two pieces by the dichotomy power meter to be fed in the two parallel resonant cavity casings. The microwave power of the waveguide device is divided into two pieces to be fed in the two axial resonant cavity casings, so that the feed power of the resonant cavity can be effectively increased, and the leakage of microwaves can be effectively reduced. The resonant cavity is reasonable in arrangement and simple in structure, two parallel resonant cavities are installed on one deposition lathe, and the equipment use efficiency of the deposition lathe can be effectively improved.

Description

technical field [0001] The invention relates to a double-cavity plasma microwave resonant cavity used for a PCVD optical fiber preform rod processing machine tool, which is an improvement on the existing plasma microwave resonant cavity. Background technique [0002] PCVD, that is, plasma chemical vapor deposition, is one of the main processes of optical fiber preform processing, and the plasma microwave resonator is the core part of the PCVD deposition processing machine tool. The existing plasma microwave resonator is mainly composed of the resonator shell and the waveguide device connected with it. A deposition lathe is usually equipped with only one microwave resonator. The main problem with the structure of this single resonator is that Feed-in and output power are limited, and only one preform liner can be processed, which makes it difficult to greatly improve the processing efficiency of the PCVD deposition lathe and the following problems arise: 1. Due to the low dep...

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Problems solved by technology

The existing plasma microwave resonator is mainly composed of a resonator shell and a waveguide device connected to it. A deposition lathe is usually equipped with only one microwave resonator. The main problem with the structure of this single resonator is Feed-in and output power are limited, and only one preform liner can be processed, which makes it difficult to greatly improve the processing efficiency of the PCVD deposition lathe and the following problems arise: 1. Due to the low deposition rate, only one liner can be processed Root processing makes PCVD processing efficiency low, increases the cost of optical fiber processing, and is difficult to meet the needs of mass production of optical fibers; 2. During deposition processing, when the deposition rate is high, the parameters of the prepared preform along the axial direction are often uneven , mainly manifested in the fluctuation of the inner diameter and refractive index of the mandrel along the length of the rod after melting and shrinkage

This will affect the processing quality and precision of the optical fiber preform; 3. In order to increase the PCVD deposition rate, it is necessary to increase the power of the microwave source and increase the feeding power of the resonant cavity. For the existing single resonant cavity structure, this will lead to a sharp deterioration of the microwave leakage , is not conducive to the safety of plasma chemical vapor deposition lathe operators

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