A High Power Plasma Microwave Resonator

Abstract

The invention relates to a high-power plasma microwave resonant cavity for a PCVD (Plasma Chemistry Vapor Deposition) optical fiber preform machining tool. The resonant cavity comprises resonant cavity shells and a waveguide device connected with the resonant cavity shells, and is characterized in that the resonant cavity is provided with two bilateral symmetric and coaxial resonant cavity shells, wherein the waveguide device is arranged on one side in the middle of the two coaxial resonant cavity shells in the direction perpendicular to the center line, the front end of the waveguide device is connected with the two resonant cavity shells through a binary power meter, the power of a microwave source is divided into two portions by the binary power meter, and the two portions of power are respectively fed into the two coaxial resonant cavity shells. Not only the feed-in power of the resonant cavity can be effectively improved, but also the leakage of microwave can be effectively reduced; two coaxial resonant cavities can produce two plasmas moving longitudinally when a liner tube is machined, thus effectively improving the deposition rate and the deposition efficiency; the fluctuations of deposition glass for the two coaxial resonant cavities in the axial direction can be counteracted to improve the uniformity of a preform and improve the machining precision and the quality parameter of optical fibers; and the resonant cavity is reasonable in setting and simple in structure.

Description

technical field [0001] The invention relates to a high-power plasma microwave resonant cavity used for a PCVD optical fiber preform rod processing machine tool, which is an improvement on the existing plasma microwave resonant cavity. Background technique [0002] PCVD, that is, plasma chemical vapor deposition, is one of the main processes of optical fiber preform processing, and the plasma microwave resonator is the core part of the PCVD deposition processing machine tool. The existing plasma microwave resonator is mainly composed of a resonant cavity shell and a waveguide device connected to it. The main problem of this single resonant cavity structure is that the feed-in and output power are limited, so that the PCVD deposition rate It is difficult to greatly improve the processing efficiency and the following problems occur: 1. Due to the low deposition rate, the PCVD deposition processing efficiency is low, which increases the cost of optical fiber processing, and it i...

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Problems solved by technology

The existing plasma microwave resonator is mainly composed of a resonant cavity shell and a waveguide device connected to it. The main problem of this single resonant cavity structure is that the feed-in and output power are limited, so that the PCVD deposition rate It is difficult to greatly improve the processing efficiency and the following problems occur: 1. Due to the low deposition rate, the PCVD deposition processing efficiency is low, which increases the cost of optical fiber processing, and it is difficult to meet the needs of mass production of optical fibers; 2. During deposition processing, When the deposition rate is high, the parameters of the prepared preform along the axial direction are often uneven, mainly manifested in the fluctuation of the inner diameter of the core rod and the refractive index along the length of the rod after melting and shrinkage.

This patent still feeds all the power into a single resonant cavity. When the microwave power is high, the leakage cannot be reduced. Moreover, the power fed into the liner by the two dislocated grooves in this patent cannot be guaranteed to be equal, and the effects of the two small grooves can not offset each other. obvious

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