Light homogenizing structure, manufacturing method thereof and light homogenizing system
A manufacturing method and microstructure technology, which can be used in optics, optical components, instruments, etc., can solve the problems of difficult processing and small beam etendue, and achieve the effects of low cost, improved uniformity, and uniform mixing.
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[0064] As mentioned in the background art, the laser homogenization device in the prior art has the problem of difficulty in processing when realizing a small optical expansion.
[0065] In view of this, an embodiment of the present invention provides a uniform light structure, including: a substrate and a pattern structure on the surface of the substrate; wherein the formation process of the pattern structure is a transfer process, and the pattern structure includes multiple This microstructure is used to homogenize the incident light beam irradiated on the surface to form a uniform light beam.
[0066] Correspondingly, an embodiment of the present invention also provides a uniform light system, including:
[0067] Laser, used to emit a laser beam to form an incident beam;
[0068] The above-mentioned homogenization structure is used to receive the incident light beam and homogenize the incident light beam irradiated on the surface thereof to form a uniform light beam;
[0069] The fl...
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