Automatic cleaning device and method for graphite boat
An automatic cleaning, graphite boat technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of inability to lock, there are hidden safety hazards, no safety doors, etc., to prevent accidents from expanding. , Save labor costs, and ensure the effect of safety
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[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0036] refer to figure 1 , the present invention claims a graphite boat automatic cleaning device, comprising a cleaning tank 10, a hydrofluoric acid storage tank 20, a waste discharge pipe 40, and a control center 60, between the cleaning tank 10 and the hydrofluoric acid storage tank 20 Connected by an acid delivery pipe 21, a diaphragm pump 22, an acid flow meter 23, and an acid valve 24 are sequentially connected in series in the direction aw...
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