Automatic cleaning device and method for graphite boat

Abstract

The invention provides an automatic cleaning device for a graphite boat and a cleaning method based on the device. Hydrofluoric acid is supplemented into equipment through a pipeline via a diaphragm circulating pump, a safety door is completed closed in the liquid adding process, hydrofluoric acid is isolated from the outside, liquid adding is automatically stopped when the safety door is opened, liquid splashing is avoided, and the safety of operators is guaranteed. The parameters such as the use amount of adopted hydrofluoric acid, bubble cleaning time and water bath disacidifying time can be set through a touch screen visually and conveniently, manual monitoring and operation are not needed, and labor cost is reduced. The automatic cleaning device is provided with a scramming device, when an accident happens, all working valves can be switched off in time, and enlargement of the accident is avoided. The stable use amount of hydrofluoric acid can be guaranteed through a flow meter, the liquid adding amount of hydrofluoric acid can be changed through the touch screen, and automatic acid adding is more stable than manual acid adding. In the cleaning and disacidifying process, the cleaning degree can be determined through a hydrofluoric acid concentration sensor arranged in a cleaning tank, and higher safety and reliability are achieved.

Description

technical field [0001] The invention relates to the technical field of photovoltaic manufacturing, in particular to a graphite boat automatic cleaning device and method. Background technique [0002] In the coating process of silicon wafers in the production process of solar cells, graphite boats are used as carriers. During the coating process, a layer of silicon nitride film will be attached to the surface of graphite boats. The silicon nitride film will affect the coating effect of silicon wafers. Therefore, regular cleaning is required. The graphite boat is cleaned. In the process of cleaning the graphite boat, the graphite boat needs to be placed in an acid-resistant container, and a certain amount of pure water and hydrofluoric acid are added to the container. After bubbling cleaning and water bath deacidification, the nitrogen on the surface of the graphite boat can be removed. Silicone is removed. When cleaning the graphite boat, processes such as adding water, a...

AI Technical Summary

Problems solved by technology

[0005] 1. Due to the strong corrosiveness of hydrofluoric acid, there are potential safety hazards when hydrofluoric acid is exposed to the external environment;

[0006] 2. The amount of acid and water in the manual cleaning process, the time of a certain process (such as bubbling, water washing), and all valve switches are all controlled manually, which has low accuracy and wastes time and labor;

[0007] 3. The current graphite boat cleaning device has no safety door, which cannot be locked during the working process. The acid-water mixture in the device directly contacts the outside world. If liquid splashes, it will easily cause danger to nearby personnel.

[0008] 4. The current graphite boat cleaning device does not have an emergency stop switch, and it cannot close all the liquid filling and ventilation valves in time when an unexpected situation occurs, posing a safety hazard

[0009] 5. The dosage of hydrofluoric acid is controlled manually, and the dosage cannot be guaranteed to be stable

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