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Film-forming mask and touch panel substrate

A film forming and masking technology, applied in ion implantation plating, conductive layer on insulating carrier, coating, etc., can solve the problems of poor film pattern position accuracy, film wrinkle, warpage, etc., and achieve improved position Accuracy, effect of suppressing deformation

Inactive Publication Date: 2016-05-04
V TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in such a conventional film-forming mask, the mask material is, for example, a flexible resin film such as polyimide, so there is a difference between the film and a thin film material such as a transparent conductive film deposited on the film. The difference in the coefficient of linear expansion between them will cause wrinkles, warpage and other deformations on the film, and there will be a problem that the position accuracy of the formed film pattern will deteriorate.

Method used

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  • Film-forming mask and touch panel substrate
  • Film-forming mask and touch panel substrate
  • Film-forming mask and touch panel substrate

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Embodiment Construction

[0019] Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. figure 1 It is a centerline cross-sectional view showing an embodiment of the film formation mask according to the present invention. This film formation mask 1 is used to form a thin film pattern on a substrate, and is configured to include a first mask 2 and a second mask 3 .

[0020] The above-mentioned first mask 2 is used to form a film on the substrate through the opening pattern 4 to form a thin film pattern, and is a mask to be a main mask, such as figure 2 As shown in (a), it is configured to include a resin film (hereinafter referred to as “resin mask 5 ”), a metal thin film 6 , and a first frame 7 .

[0021] Here, the above-mentioned resin mask 5 corresponds to a plurality of thin film patterns formed on the substrate, and is formed with a plurality of penetrating opening patterns 4 having the same shape and size as the thin film patterns, for...

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Abstract

The present invention provides a film-forming mask and a touch panel substrate. The film-forming mask comprises: a resin mask (5) on which is formed an opening pattern (4) corresponding to a thin-film pattern film-formed on a substrate; and a metal mask (11) of a magnetic metal member, which is provided on one side of the resin mask (5) with a gap (9) provided between the metal mask (11) and the resin mask (5), and in which are formed holes (13) of a size which encapsulate each of the openings of the opening pattern (4).

Description

technical field [0001] The present invention relates to a film-forming mask for forming a thin-film pattern on a substrate, and in particular to a film-forming mask capable of suppressing deformation of the mask caused by a difference in linear expansion coefficient between a mask material and a film material, thereby improving positional accuracy of a thin-film pattern film-forming masks and touch panel substrates. Background technique [0002] Conventional film-forming masks use a film-forming mask that utilizes a flexible adhesive film that covers the portion that should be a non-deposited area so that the material that is in close contact with the surface of the substrate is made of a flexible film. In the configuration, after the flexible adhesive film is closely attached to the entire surface of the film-forming side of the substrate, the flexible adhesive film that covers the area for forming the desired buildup layer is selectively removed, and then the In the film-...

Claims

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Application Information

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IPC IPC(8): C23C14/04H01B5/14
CPCC23C14/042C23C14/086C23C14/34G06F3/041G06F2203/04103
Inventor 水村通伸
Owner V TECH CO LTD
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