Film-forming mask and touch panel substrate

A film forming and masking technology, applied in ion implantation plating, conductive layer on insulating carrier, coating, etc., can solve the problems of poor film pattern position accuracy, film wrinkle, warpage, etc., and achieve improved position Accuracy, effect of suppressing deformation

Inactive Publication Date: 2016-05-04
V TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in such a conventional film-forming mask, the mask material is, for example, a flexible resin film such as polyimide, so there is a difference between the film and a thin film material such as a transparent conductive film deposite

Method used

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  • Film-forming mask and touch panel substrate
  • Film-forming mask and touch panel substrate
  • Film-forming mask and touch panel substrate

Examples

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Example Embodiment

[0019] The embodiments of the present invention will be described in detail below based on the drawings. figure 1 It is a centerline cross-sectional view showing an embodiment of the film formation mask according to the present invention. The film forming mask 1 is used to form a thin film pattern on a substrate, and is configured to include a first mask 2 and a second mask 3.

[0020] The above-mentioned first mask 2 is used to form a film on a substrate through the opening pattern 4 to form a thin film pattern, and is a mask that becomes a main mask, such as figure 2 As shown in (a), the structure includes a resin film (hereinafter referred to as “resin mask 5”), a metal thin film 6 and a first frame 7.

[0021] Here, the above-mentioned resin mask 5 corresponds to a plurality of thin film patterns formed on a substrate, and a plurality of through opening patterns 4 having the same shape and size as the thin film pattern are formed, for example, a thickness of 10 μm to 30 μm. Le...

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Abstract

The present invention provides a film-forming mask and a touch panel substrate. The film-forming mask comprises: a resin mask (5) on which is formed an opening pattern (4) corresponding to a thin-film pattern film-formed on a substrate; and a metal mask (11) of a magnetic metal member, which is provided on one side of the resin mask (5) with a gap (9) provided between the metal mask (11) and the resin mask (5), and in which are formed holes (13) of a size which encapsulate each of the openings of the opening pattern (4).

Description

technical field [0001] The present invention relates to a film-forming mask for forming a thin-film pattern on a substrate, and in particular to a film-forming mask capable of suppressing deformation of the mask caused by a difference in linear expansion coefficient between a mask material and a film material, thereby improving positional accuracy of a thin-film pattern film-forming masks and touch panel substrates. Background technique [0002] Conventional film-forming masks use a film-forming mask that utilizes a flexible adhesive film that covers the portion that should be a non-deposited area so that the material that is in close contact with the surface of the substrate is made of a flexible film. In the configuration, after the flexible adhesive film is closely attached to the entire surface of the film-forming side of the substrate, the flexible adhesive film that covers the area for forming the desired buildup layer is selectively removed, and then the In the film-...

Claims

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Application Information

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IPC IPC(8): C23C14/04H01B5/14
CPCC23C14/042C23C14/086C23C14/34G06F3/041G06F2203/04103
Inventor 水村通伸
Owner V TECH CO LTD
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