Saturated humidity generator

Abstract

The invention discloses a saturated humidity generator comprising a first closed container, a second closed container, and a cooling system. A gas inlet end of a first gas circuit is a gas input end, and the gas outlet end of the first gas circuit is disposed on the upper part of the inner cavity of the first closed container. A gas inlet end of a second gas circuit is disposed on the lower part of the inner cavity of the first closed container. Deionized water is accommodated in a second closed container, and the gas outlet end of the second gas circuit is disposed under the liquid level of the deionized water in the second closed container. A gas inlet end of a third gas circuit is disposed above the liquid level of the deionized water in the second closed container, and the gas outlet end of the third gas circuit is connected with a gas inlet end of a cooling pipe of a cooling system. The cooling system comprises a substrate provided with the built-in cooling pipe, and the substrate is provided with a cooling device. A controller is connected with the cooling device in a controlled manner, and the gas outlet end of the cooling pipe is the gas output end. The saturated humidity generator can be used to convert the gas having the unknown vapor pressure input by the gas inlet opening into the gas having the known vapor pressure output by the gas outlet opening, and therefore the accurate control over the vapor pressure can be realized.

Description

technical field [0001] The invention relates to the field of gas humidity control, in particular to a saturated humidity generator. Background technique [0002] The saturated humidity generator is the core component of the standard humidity generating device. The saturated humidity generator can change the unknown water vapor pressure into a known water vapor pressure device. Its performance parameters directly determine the accuracy of the standard humidity generating device. Existing saturated humidity generators lack constant temperature control and simply pass the gas through a tank. The saturation degree of water vapor depends on the contact time and contact area of ​​the gas in the water tank, and the output water vapor pressure after the gas fully contacts with the water in the water tank depends on the current ambient temperature, and the fluctuation of the ambient temperature can easily cause the output of water vapor Therefore, the accuracy of the water vapor pre...

AI Technical Summary

Problems solved by technology

The saturation degree of water vapor depends on the contact time and contact area of ​​the gas in the water tank, and the output water vapor pressure after the gas fully contacts with the water in the water tank depends on the current ambient temperature. Due to the fluctuation of the ambient temperature, it is easy to cause the output of water vapor Therefore, the accuracy of the water vapor pressure output by the existing saturated humidity generator is poor, which can no longer meet the needs of actual work.

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