Chip spectrograph with sub-wavelength metal structure

A metal structure, chip-type technology, applied in the field of spectral detection, can solve the problems of difficult integration, poor flexibility, slow measurement speed, etc., and achieves the effect of no mechanical movement, miniaturization and simple structure.

Active Publication Date: 2016-06-01
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a chip-type spectrometer with a sub-wavelength metal structure to solve the pro

Method used

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  • Chip spectrograph with sub-wavelength metal structure
  • Chip spectrograph with sub-wavelength metal structure
  • Chip spectrograph with sub-wavelength metal structure

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Embodiment Construction

[0021] Please refer to Figure 1 to Figure 5 , the present invention provides a chip-type spectrometer with a sub-wavelength metal structure, comprising: a sub-wavelength filtering unit array 1 and a photodetector array 2, the photodetector array 2 is arranged on the light-emitting side of the sub-wavelength filtering unit array 1, and the sub-wavelength filtering unit array 1 The wavelength filtering unit array 1 includes a substrate 3 and a metal film 4 attached to the substrate 3. The metal film 4 is provided with a plurality of openings 5 ​​arranged in an array. Under the action of surface plasmon resonance, the subwavelength metal hole array of a specific period It has a specific spectral transmittance characteristic, which is used to determine the opening period between each row of openings 5 ​​. For example, some openings 5 ​​are arranged in a specific period on the metal film 4 to form a filter unit, and a plurality of filter units arranged in different periods are arr...

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Abstract

The invention provides a chip spectrograph with a sub-wavelength metal structure, comprising a sub-wavelength filter unit array and a photoelectric detector array. The photoelectric detector array is arranged on the light-out side of the sub-wavelength filter unit array. The sub-wavelength filter unit array includes a substrate and a metal film adhered to the substrate. The metal film is provided with multiple openings arranged in an array, and the opening cycle of each row of openings is determined by the spectral transmission characteristic of a sub-wavelength metal hole array. The chip spectrograph has a simple structure, and needs no mechanical movement. All the optical components are on the same optical axis and can be integrated easily. By using a nanometer-level film, the problem on how to miniaturize a spectrometer to the chip scale is solved.

Description

technical field [0001] The invention relates to the technical field of spectrum detection, in particular to a chip-type spectrometer with a sub-wavelength metal structure. Background technique [0002] Spectrometer is the basic equipment for analyzing and measuring the composition and structure of substances by using optical technology, electronic technology and computer technology. It has been widely used in astronomy, environmental detection, thin film industry, food composition detection and other fields. However, due to the limitations of working principle and processing technology, traditional spectrometers generally have disadvantages such as complex structure, slow measurement speed, limited use environment, poor flexibility and difficult integration. Therefore, the development of small or even chip-type spectrometers is becoming a research hotspot in recent years. Contents of the invention [0003] The purpose of the present invention is to provide a chip-type spe...

Claims

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Application Information

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IPC IPC(8): G01J3/28
Inventor 杨正崔钧夏良平尹韶云史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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