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Chip-type spectrometer with subwavelength metallic structures

A metal structure and chip-type technology, applied in the field of spectral detection, can solve the problems of difficult integration, poor flexibility, and slow measurement speed, and achieve the effects of no need for mechanical movement, miniaturization, and simple structure

Active Publication Date: 2018-06-05
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a chip-type spectrometer with a sub-wavelength metal structure to solve the problems of complex structure, slow measurement speed, limited use environment, poor flexibility and difficult integration in the prior art.

Method used

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  • Chip-type spectrometer with subwavelength metallic structures
  • Chip-type spectrometer with subwavelength metallic structures
  • Chip-type spectrometer with subwavelength metallic structures

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Embodiment Construction

[0021] Please refer to Figure 1 to Figure 5 , the present invention provides a chip-type spectrometer with a sub-wavelength metal structure, comprising: a sub-wavelength filtering unit array 1 and a photodetector array 2, the photodetector array 2 is arranged on the light-emitting side of the sub-wavelength filtering unit array 1, and the sub-wavelength filtering unit array 1 The wavelength filtering unit array 1 includes a substrate 3 and a metal film 4 attached to the substrate 3. The metal film 4 is provided with a plurality of openings 5 ​​arranged in an array. Under the action of surface plasmon resonance, the subwavelength metal hole array of a specific period It has a specific spectral transmittance characteristic, which is used to determine the opening period between each row of openings 5 ​​. For example, some openings 5 ​​are arranged in a specific period on the metal film 4 to form a filter unit, and a plurality of filter units arranged in different periods are arr...

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Abstract

The invention provides a chip-type spectrometer with a sub-wavelength metal structure, comprising: a sub-wavelength filtering unit array and a photodetector array, the photodetector array is arranged on the light-emitting side of the sub-wavelength filtering unit array, and the sub-wavelength filtering unit array includes The base and the metal film attached to the base are provided with a plurality of openings arranged in an array, and the opening period between each row of openings is determined by the spectral transmission characteristics of the sub-wavelength metal hole array. The invention has a simple structure, no need for mechanical movement, and all optical elements have a common optical axis, which is convenient for integration, and adopts a nanoscale thin film, which solves the problem of miniaturization of the spectrometer to the chip scale.

Description

technical field [0001] The invention relates to the technical field of spectrum detection, in particular to a chip-type spectrometer with a sub-wavelength metal structure. Background technique [0002] Spectrometer is the basic equipment for analyzing and measuring the composition and structure of substances by using optical technology, electronic technology and computer technology. It has been widely used in astronomy, environmental detection, thin film industry, food composition detection and other fields. However, due to the limitations of working principle and processing technology, traditional spectrometers generally have disadvantages such as complex structure, slow measurement speed, limited use environment, poor flexibility and difficult integration. Therefore, the development of small or even chip-type spectrometers is becoming a research hotspot in recent years. Contents of the invention [0003] The purpose of the present invention is to provide a chip-type spe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28
Inventor 杨正崔钧夏良平尹韶云史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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