A scintillator detector based on molybdenum disulfide transistor and its manufacturing method
A technology of molybdenum disulfide and its production method, which is applied in the field of radiation detection, can solve the problems of low conversion efficiency of PIN photodiodes, low sensitivity of scintillator detectors, and poor signal-to-noise ratio, and achieve simple structure, low cost, and reduced dark The effect of current
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[0022] In order to make the purpose, features and advantages of the present invention clearer, the specific implementation of the present invention will be described in more detail below in conjunction with the accompanying drawings and embodiments. In the following description, many specific details are set forth for the convenience of The invention is fully understood, but it can be practiced in many other ways than that described. Accordingly, the present invention is not limited to the specific implementations disclosed below.
[0023] A method for manufacturing a scintillator detector based on a molybdenum disulfide transistor, the scintillator detector is as figure 1 , figure 2 As shown, it includes a conductive silicon substrate 10, the back surface of the conductive silicon substrate 10 is provided with a gate electrode 11, the front surface is provided with a gate insulating layer 12, and the gate insulating layer 12 is provided with a single layer of molybdenum dis...
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