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A device and method for improving particle conditions of furnace tube crystal boat support feet

A technology of supporting feet and particles, which is applied in the direction of cleaning methods using gas flow, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as product yield loss, process defects, drifting, etc., and achieve the effect of improving particle conditions

Active Publication Date: 2018-08-28
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The advantage of the above-mentioned crystal boat is its simple structure, but at the same time, due to the limitation of the position of its supporting legs, when the process of high temperature process is used, the supporting contact parts of the supporting legs of the crystal boat are easy to be damaged by fine friction or due to thin film during the rotation process. After growth, there is peeling (peeling) and the phenomenon of high particle size
In the process of continuous friction between each product batch and the supporting feet, more and more particles will accumulate, and the aggregated particles will float to the surface of the product, causing process defects and eventually leading to the loss of product yield

Method used

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  • A device and method for improving particle conditions of furnace tube crystal boat support feet
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  • A device and method for improving particle conditions of furnace tube crystal boat support feet

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Embodiment Construction

[0028] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0029] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0030] In the following specific embodiments of the present invention, please refer to image 3 , image 3 It is a schematic structural diagram of a device for improving the particle condition of the support feet of the furnace tube crystal boat according to a preferred embodiment of the present invention. Such as image 3 As shown, a device of th...

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Abstract

The invention discloses a device and a method for improving the condition of particles of boat slot pins of a furnace tube. Spray nozzles are arranged at two sides of a mechanical arm, so that in the process that the mechanical arm is used to transmit wafers to the boat, supporting parts of the boat slot pins are purged with gas, the purpose of cleaning the boat slot pins is achieved, and the condition of particles of a furnace tube machine is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, and more particularly, to a device and method for improving particle conditions at the support feet of a furnace tube crystal boat. Background technique [0002] With the development of semiconductor device technology and proportional size reduction, while meeting the precision required by the process, the cost of the product process has also become an important operating indicator. [0003] see figure 1 , figure 1 It is a schematic diagram of the structure of a traditional furnace tube machine. Such as figure 1 As shown, the main structure of the furnace tube machine includes a process chamber 10 and a wafer boat (boat) 11. A plurality of wafer (Wafer) products 12 are loaded in the wafer boat 11 in a horizontal manner. The wafer boat 11 can be viewed from the bottom of the process chamber 10 The furnace door enters and exits the process chamber vertically, so that the waf...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B5/02
CPCB08B5/02
Inventor 张召张乐成王智苏俊铭倪立华
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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