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96 results about "Particulate pollution" patented technology

Particulate pollution is pollution of an environment that consists of particles suspended in some medium. There are three primary forms: atmospheric particulate matter, marine debris, and space debris. Some particles are released directly from a specific source, while others form in chemical reactions in the atmosphere. Particulate pollution can be derived from either natural sources or anthropogenic processes.

Containerised handling of bulk materials and apparatus therefor

A freight container (10) has a base (20) or a portion thereof that can be opened to discharge its contents. This container (10) has a top which can be opened in similar manner as the base. Another container having at least one compartment, each compartment having a lower section with a reducing cross-sectional area and a pivotably operable closure assembly, with several such closure assemblies being linked together by means of bars. Such a container is used to contain raw building materials for stockpiling of these materials at a container port. It is also used to supply materials to a concrete production plant whee pollution control containers are provided below the supply container and above the scaling and mixing stations to reduce particulate pollution. A pair of slewing apparatuses is also provided to engage both ends of a container and turn the container over about its longitudinal axis, thereby emptying its contents.
Owner:ONG BEE KIM

Method for removal of materials from a liquid stream

A method for removal of dissolved materials and / or particles from a liquid stream comprising flocculation by vigorously mixing polysaccharides or hydrocolloids into the liquid stream and subsequent gelation of the polysaccharides or hydrocolloids with cations capable of gelling same. Large, strong gelled agglomerates of pollutant and polysaccharide or hydrocolloid are formed with the help of suitable cations. The gelled agglomerates are well suited to separation from a liquid stream by flotation, in a sieve, in a centrifuge, in a cyclone or via other conventional separation processes. Also described is a method for mixing of un-dissolved polysaccharide or hydrocolloid with a polluted aqueous stream by shearing the polysaccharide or hydrocolloid into the aqueous stream to improve logistics and provide economic savings in treatment of large volumes of water. Also described is the use of dilute solutions of polysaccharides for treatment of a variety of effluent streams. An application of the invention is provided for removal of hydrocarbons within the oil industry, but also for other kinds of oil-containing water and also water with organic or particulate pollution.
Owner:SORBWATER TECH AS

Nanometer negative ion environmental-protection coating

InactiveCN106433280APlay a decorative effectLong-lasting and effective adsorptionCoatingsOxygen ionsMaterials science
The invention relates to a nanometer negative ion environmental-protection coating, which is characterized by being prepared from the following components in parts by weight: 10 to 30 parts of emulsion, 10 to 50 parts of deionized water, 1 to 5 parts of negative ion additive, 15 to 25 parts of titanium dioxide, 0.5 to 5 parts of accessory ingredient, and 1 to 15 parts of filler. When being coated in any indoor site, the nanometer negative ion environmental-protection coating not only achieves a decorative effect, but also can durably and effectively adsorb indoor air pollutants, releases a large number of negative oxygen ions at the same time for cleaning air, and builds a healthy environment of a natural air anion bar indoors completely for comprehensively caring life health of people. The nanometer negative ion environmental-protection coating provided by the invention is beneficial to durably improving the indoor environment, purifying indoor air, bacterium-resisting, disinfecting, purifying volatile organic cancerogens such as formaldehyde, methylbenzene, benzene, sulphur and ammonia indoors, and removing peculiar smells such as stinks, musty taste and smoke flavor; can durably release the negative oxygen ions for building the natural air anion bar indoors, and has a health-care effect for making people healthier; can effectively adsorb for a long time and settle particulate pollution of PM2.5 (Particulate Matter2.5) entering indoor from outdoor so as to enable people to escape from an outdoor haze air environment.
Owner:上海利民环保节能科技有限公司

Air conditioning cabinet for controlling indoor air pollution in haze days and operating method thereof

The invention discloses an air conditioning cabinet for controlling indoor air pollution in haze days. A fresh air pipe, an air supplying pipe and an air returning pipe are respectively communicated with the air conditioning cabinet, the fresh air pipe is communicated with a fresh air filtering section inside the air conditioning cabinet through a valve, and the fresh air filtering section is divided into an upper fresh air channel and a lower fresh air channel which are independent. A first fresh air valve, at least two levels of fresh air filters, a fresh air draught fan and a second fresh air valve are sequentially arranged inside the upper fresh air channel in the air supplying direction. The filtering efficiency of the two levels of fresh air filters increases gradually in the air supplying direction. A third fresh air valve, a first fresh air filter and a fourth fresh air valve are sequentially arranged inside the lower fresh air channel in the air supplying direction. Under normal working conditions, fresh air enters a mixing section from the lower fresh air channel. In the haze days, the fresh air enters the mixing section from the upper fresh air channel, and therefore the indoor particulate pollution in the haze days is controlled, the resistance of an air conditioning system in the normal working conditions is not increased, operation is economical, and control is easy and convenient.
Owner:CHINA SOUTHWEST ARCHITECTURAL DESIGN & RES INST CORP LTD

Injection composition of fat milk, amino acid and glucose packed with three-cavity bag and preparing method thereof

The invention discloses an injection composition packaged in a three-cavity bag. The three cavities separated by diaphragm are respectively filled with fattiness milk injection, compound amino acid injection, and glucose injection. The using method is crimping each cavity in turns, or divulging the isolating bar in each cavity to mix the injections for venoclysis so as to avoid the venture of microorganism and particulates pollution in traditional mix processing. The mix processing can be carried out under any environmental condition which qualifies the small hospital without aseptic preparation condition to use the nutrition, highly reduce the untoward reaction such as transfusion heater response, sanguis infection, and blood poisoning due to traditional mix processing.
Owner:费森尤斯卡比华瑞制药有限公司

Haze-reducing coating of bituminous pavement

ActiveCN104231855AEfficient haze reduction effectBest haze reduction efficiencyIn situ pavingsPaving detailsEpoxyMass ratio
The invention discloses a haze-reducing coating of a bituminous pavement. The haze-reducing coating comprises the following components in parts by mass: 1 part of nano-titanium dioxide, 1-5 parts of active aluminum oxide, 7-8 parts of epoxy resin, 2-3 parts of a curing agent and 2-4 parts of an assistant, wherein the curing agent is a mixture of a modified fatty amine liquid curing agent HTS-4512 and a special composite epoxy curing agent HTC-101 based on a mass ratio of (2-4) to 1; the assistant is a mixture of a defoamer and carborundum or carbon black based on a mass ratio of (1 to 2) to (4 to 1). According to the haze-reducing coating, the synergistic effect of active aluminum oxide and nano-titanium dioxide is used; the obtained haze-reducing coating not only is good in water resistance, slip resistance and environmental friendliness but also can degrade harmful gas causing secondary particulate pollution in automobile exhaust and well adsorb PM2.5 particles in the automobile exhaust to achieve a relatively good haze-reducing effect; a test shows that the optimal haze-reducing efficiency of the coating on the PM2.5 particles can reach 41.2 microgram / m<3>.min.
Owner:CHANGAN UNIV

A method for estimating air particulate pollution degree based on shallow convolution neural network

The invention discloses a method for estimating air particulate pollution degree based on shallow convolution neural network. The basic steps of the method include: 1. Constructing a shallow convolution neural network (PMIE) model with a layer enhancement function; 2. Combining the output of PMIE model with four kinds of weather eigenvalues to construct regression model; 3. Trainning PMIE model and regression model; 4. The PM2.5 index of the test set image is estimated by using the trained PMIE model and regression model. The invention provides a shallow convolution neural network model with layer enhancement function, Combining the output results with four kinds of weather features to estimate the degree of air particulate pollution in the image, the problem caused by feature extraction and feature optimization is effectively avoided, and the specific PM2.5 index value is obtained, which improves the training convergence speed and algorithm robustness, and has better performance.
Owner:NORTHWEST UNIV(CN)

SDABB source apportionment method, system, terminal equipment and computer readable storage medium

The invention relates to an SDABB source apportionment method, a system, terminal equipment and a computer readable storage medium. The method comprises following steps: step one, collecting and analyzing atmospheric particulate pollution sources and identifying labeling components in the atmospheric particulate pollution sources; step two, calculating the particle size distribution of the labeling components; step three, collecting and analyzing the components of environmental particulate pollution sources; and step four, utilizing a three dimensional factor analysis model of multisource spectrum matrix nesting parallel factor analysis to calculate the concentration matrix of the environmental particulate components; substituting the particle size distribution of the labeling components obtained in the step two into the algorithm to obtain a source spectrum matrix and a source contribution matrix, identifying the sources, and quantifying the contribution of the sources. The provided method has the advantages that the particle size distribution of labeling components of atmospheric particulate sources is substituted into a three dimensional factor source apportionment algorithm, the obtained results are more accord with the physical meaning of particle size distribution of particulate sources, and the accuracy of source apportionment results is improved.
Owner:NANKAI UNIV

Method and system for continuously purifying indoor environment

The invention relates to the technical field of electronic communication, in particular to a method and system for continuously purifying an indoor environment. According to the method and system for continuously purifying the indoor environment, because outdoor purified air is introduced, the indoor particulate pollution degree can be significantly lowered, the harm caused by indoor pollution to the human body is reduced, a remarkable effect is achieved on keeping indoor air clean, the content and concentrate of indoor oxygen atoms are improved, so that indoor air pollution caused by window opening and ventilation is avoided under the condition that the outdoor environment is polluted for a long time, and the method and system for continuously purifying the indoor environment have an important function on guaranteeing the physical health of the elderly, children and special crowds; besides, the principle is clear, and the method is definite; and a device involved in the method and system for continuously purifying the indoor environment is simple in structure, easy to popularize in families, hotels and public places and convenient to use, has the universal use significance, can optimize the family environment and automatically adjust the family environment according to health reports of people and thoroughly solves the family environment problem.
Owner:YUTOU TECH HANGZHOU

Method making back of wafer flat

The invention relates to the manufacture field of semiconductors, in particular to a method making a back of a wafer flat. The method comprises the following steps: a slide glass wafer is bonded with a device wafer through a bonding oxidizing material; the device wafer is deburred to enable edges of the device wafer to be smooth and evasive; the back of the device wafer is caught out mechanical lapping, and the thickness of the device wafer is lapped to be 25 microns -50 microns; the back of the device wafer is processed through a chemical method, and the thickness of the device wafer is further reduced to 2 microns-3 microns. Monox which has a hard character is etched through a chemical etching method. For a process with thickness requirements which is high in accuracy, chemical lapping is easier to control than the mechanical lapping, and particulate pollution cannot be polluted.
Owner:WUHAN XINXIN SEMICON MFG CO LTD

Eavcuation valve control device

The present invention includes side valve, isolation valve, valve control unit, vacuum pump, cavity, and vacuum switch. Said invention can effectively control particulate pollution in reaction cavity vacuum-pumping process, even in unit platform state such as cavity state pumping speed varying.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

An air conditioning box for controlling indoor air pollution in smoggy days and its operating method

The invention discloses an air conditioning cabinet for controlling indoor air pollution in haze days. A fresh air pipe, an air supplying pipe and an air returning pipe are respectively communicated with the air conditioning cabinet, the fresh air pipe is communicated with a fresh air filtering section inside the air conditioning cabinet through a valve, and the fresh air filtering section is divided into an upper fresh air channel and a lower fresh air channel which are independent. A first fresh air valve, at least two levels of fresh air filters, a fresh air draught fan and a second fresh air valve are sequentially arranged inside the upper fresh air channel in the air supplying direction. The filtering efficiency of the two levels of fresh air filters increases gradually in the air supplying direction. A third fresh air valve, a first fresh air filter and a fourth fresh air valve are sequentially arranged inside the lower fresh air channel in the air supplying direction. Under normal working conditions, fresh air enters a mixing section from the lower fresh air channel. In the haze days, the fresh air enters the mixing section from the upper fresh air channel, and therefore the indoor particulate pollution in the haze days is controlled, the resistance of an air conditioning system in the normal working conditions is not increased, operation is economical, and control is easy and convenient.
Owner:中建西南院(四川)科技有限公司

Source analysis method and device for particulate matter pollution

The invention provides a source analysis method and device for particulate matter pollution, and relates to the technical field of pollution source analysis. The method comprises the following steps:obtaining meteorological data, particulate matters corresponding to a target region, and component data of the particulate matters; based on the particulate matter and component data, parsing according to a receptor model to obtain pollution source concentration data; performing image simulation based on the meteorological data, and determining an air mass track influencing the target area; and determining a potential source and a concentration weight of the pollution source in the target area based on the air mass track and the pollution source concentration data. Pollution source data of a target area are obtained through the receptor model, an air mass track of the target area is obtained based on meteorological data, the potential source area influencing the pollution source of the target area is obtained through a potential source contribution analysis method, and the problem of area transmission of a pollution source is solved.
Owner:3CLEAR SCI & TECH CO LTD +1

Atmospheric particulate pollution source analysis method and device

ActiveCN111798928AMeet the needs of analytical refinementAnalysis refinementMolecular entity identificationChemical structure searchParticulate pollutionData source
The invention provides an atmospheric particulate pollution source analysis method and device, and relates to the technical field of pollution source analysis, and the method comprises the steps: carrying out the analysis based on a first receptor model to obtain the first source contribution concentration of each type of pollution source to particulate matters; analyzing based on a numerical model to obtain a second source contribution concentration of each type of pollution source to the particulate matters; and analyzing through a second receptor model based on the first source contributionconcentration, the second source contribution concentration, the first uncertainty data, the second uncertainty data, the source concentration corresponding relation and the uncertainty correspondingrelation to obtain a refined comprehensive source analysis result. By combining the receptor model with the numerical model, an accurate refined source analysis result can be obtained simply and conveniently.
Owner:3CLEAR SCI & TECH CO LTD

Reacting chamber and plasma processing system with same

The invention discloses a reacting chamber. The chamber is provided with a vacuum pump port connected with a vacuum pump, and is provided with a guide part corresponding to a turning position in the chamber, wherein the shape and the arrangement direction of the guide part conform to the air flow direction in the chamber for reducing and even preventing air flow in the chamber from generating reflection and onflow phenomenon. Furthermore, the invention also provides a plasma processing system with the reacting chamber. The reacting chamber and the plasma processing system can reduce and even avoid particulate pollution in the chamber so as to improve the manufacturing / processing quality of a workpiece, technical yield and air exhaust velocity.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

Film forming apparatus and film forming method

The invention provides a film forming apparatus and a film forming method. Under the situation of using a solid raw material to form a film, a filming forming raw material gas can be supplied to the surface of a substrate stably and effectively, and the particulate pollution and the possibility that impurities are mixed in the film can be reduced. A film forming apparatus(100) comprises a processing container(1) for accommodating a wafer(W), a substrate heater(11) for heating the wafer(W), a keeping part(21) for keeping the wafer(W), a workbench(31) used as a raw material supporting table and a raw material heater(41) for heating the solid raw material. In the film forming apparatus, for example, on the workbench(31), the solid raw material is heated on one hand, and is reacted with other gasification promoting gas on the other hand, and the generated film forming raw material gas is supplied to the lower surface(a processed surface) of the wafer(W) kept on the keeping part(21), so that the film forming raw material gas generates a thermal decomposition on the surface of the wafer(W) to form the film.
Owner:TOKYO ELECTRON LTD

Method and system for reducing semiconductor chip particle contamination

The invention discloses a method for reducing the particulate pollution of a semiconductor substrate, and a system thereof, pertaining to the field of semiconductor processing and manufacture. The method includes the steps that a semiconductor substrate is transferred to a substrate transfer station by an atmospheric mechanical arm; particles adsorbed on the surface of the semiconductor substrate are adsorbed and removed by an electrostatic field generating device; the adsorbed and removed particles are blown away by an air filtering and distributing device; and the semiconductor substrate is removed out of the substrate transfer station by the atmospheric mechanical arm. The system comprises the atmospheric mechanical arm, the substrate transfer station, the air filtering and distributing device, an ion generator and the electrostatic field generating device. In the invention, the electrostatic field generating device is added at the atmospheric end of a transfer system to control the adsorption mode of the particles of the semiconductor substrate so as to effectively reduce the particulate pollution during the transfer process of the semiconductor substrate and improve the rate of finished semiconductor substrate.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

Extra-large-flow radioactive aerosol sampling device

The invention provides an extra-large-flow radioactive aerosol sampling device and belongs to the field of radiation protection and environmental protection. The sampling device is in a box structure with a control panel, comprises an upper sampling circuit and a lower sampling circuit and consists of a cyclone type air inlet cylinder, an aerosol sampling head, a vacuum pressure gage, a flow monitor, a vacuum pump, an automatic control unit, a joint and a pipeline. According to the sampling device, with the design of the cyclone type air inlet cylinder and the double sampling circuits, the blockage of a filter material can be effectively relieved, and the sampling device is particularly suitable for the extra-large-flow collection of radioactive aerosol under complex weather conditions or severe atmospheric particulate pollution.
Owner:NUCLEAR & RADIATION SAFETY CENT

Nano-photocatalytic composite haze and formaldehyde removal latex paint and preparation method thereof

ActiveCN104650735AEliminate air purification effectHigh activityEmulsion paintsBenzeneParticulate pollution
The invention discloses a nano-photocatalytic composite haze and formaldehyde removal latex paint. The latex paint is characterized by consisting of the following components in percentage by weight: 20-25% of water, 1.5-2% of polymeric dispersants, 2-2.5% of multifunctional auxiliaries, 25-35% of a nano-photocatalytic carbon-silicon composite raw material, 15-20% of filler and pigment, 20-30% of an emulsion and 1-2% of a coalescing agent. The latex paint disclosed by the invention can effectively absorb PM2.5 particulate pollution, free formaldehyde, benzene, methylbenzene, dimethylbenzene, ammonia gas and the like existing in the environment for a long time; the invention also discloses a method for preparing the composite air purifying latex paint; and the effect of the latex paint on effectively absorbing the PM2.5 particulate pollution, free formaldehyde, benzene, methylbenzene, dimethylbenzene, ammonia gas and the like can be improved.
Owner:广东顺德嘉乐士涂料有限公司

Ionized skeleton polymer capable of clearing particulate pollution and preparation method of ionized skeleton polymer

ActiveCN105017556APurification costs riseConducive to harmonious coexistenceOther chemical processesPolymerIon
The invention relates to an ionized skeleton polymer and a preparation method thereof as well as application of the ionized skeleton polymer in clearing particulate pollution. According to the invention, the existing three-dimensional skeleton structure specific to melamine sponge is utilized so that a chitosan coating coats the skeleton, glycol glycidyl ether and the chitosan coating react to be crosslinked, the surface of the skeleton carries abundant epoxy groups, the epoxy groups react with sodium hydrogen sulfite to generate sulfonate negative ions so that the surface of the skeleton adsorbs a plenty of small water drops due to strong hydrophilization, and particulates can be transferred to the adsorbed water drops when air circulates in a material duct so as to achieve the purification of polluted air. The air purification manner has the advantages that device structure is simple, and the ionized skeleton polymer can be recycled many times, is low in cost, little in energy consumption and strong in adaptability, has no harm to environment and human and has no secondary pollution.
Owner:NINGBO UNIV

Air filter system having self-cleaning function

The invention relates to an air filter system having a self-cleaning function. The air filter system comprises an air filter (1) which comprises a shell (4), a safety filter core (5), a main filter core (6) and a cover (7); the air filter system further comprises a self-cleaning device (2) and a self dust exhaust device (3); the self-cleaning device (2) comprises a first air source (9), a first air valve (10), a first air pipe (11) and an air inlet pipe (8) which are connected in sequence; the air inlet pipe (8) is installed on the cover (7); the self dust exhaust device (3) comprises a secondair source (12), a second air valve (13), a second air valve (14), a Venturi dust exhaust pipe (15) and a dust exhaust bag (16); and the Venturi dust exhaust pipe (15) is connected with the shell (4)through a connection pipe (17). Compared with the prior art, the air filter system has the advantages of being long in service life, and capable of adapting to high-particulate polluted environment,protecting human bodies and protecting an engine.
Owner:MANNHUMMEL FILTER SHANGHAI

Method for monitoring concentration of atmospheric particulars based on support vector machine and tree leaf magnetism

The invention relates to the technical field of a method for monitoring atmospheric particulars PM2.5 and PM10, in particular to a method for monitoring concentration of atmospheric particulars basedon a support vector machine and tree leaf magnetism. The method specifically comprises the following steps: (1) collecting tree leaf samples; (2) testing the parameters of the tree leaf magnetism; (3)analyzing the correlation between the concentration of the atmospheric particulates and the parameters of the tree leaf magnetism; (4) building a model of the support vector machine; (5) evaluating the error of the model. The method has the advantages that the method is simple and convenient; a PM2.5 and PM10 concentration simulation model is built by utilizing the magnetism features of the natural carrier (namely the tree leaves) and the support vector machine tool, a novel experience direction is provided for applying the environment magnetism to the simulation of time-space distribution ofurban atmospheric particulate pollution, and the important reference is provided for the identification and risk management of key pollution area of urban atmospheric particulates.
Owner:NANJING UNIV

Atmospheric particulate collection and analysis device and collection and analysis method thereof

The invention belongs to the technical field of atmospheric particulate collection and analysis, and discloses an atmospheric particulate collection and analysis device and a collection and analysis method thereof. The collection and analysis method of the atmospheric particulate collection and analysis device comprises the steps: atmospheric particulate concentration data and images are collected, and atmospheric particulate images are recognized; the collected concentration data are corrected, compared and analyzed; and the source of atmospheric particulates is traced, and atmospheric particulate data are stored and displayed. By establishing the correction model, the data of the monitoring station can be directly corrected, so that the accuracy of the atmospheric particulate mass concentration data is improved; a source list-meteorological model-particle diffusion model technology is adopted to analyze atmospheric particulate pollution sources, and a pollution source area identification model is established; historical and future particulate matter pollution sources can be traced, the traceability result is accurate, the targeting performance is high, and the supporting performance specified by the prevention and control policy is particularly high.
Owner:HUNAN CITY UNIV

Semiconductor device and operation method thereof

The invention provides a semiconductor device and an operation method thereof. The semiconductor device comprises: a wafer fixing platform used in a process to fix a wafer, wherein the wafer fixing platform is provided with a wafer placing position for accommodating the wafer at a specified position in a specified plane; and a wafer overturning device used for overturning the wafer relative to thespecified plane. According to the wafer overturning device, the wafer is overturned by introducing the wafer overturning device, so that the wafer conveying process additionally increased due to wafer overturning is reduced, the particulate pollution and the wafer breaking risk caused by the additionally increased wafer conveying process are avoided, and the product yield is improved.
Owner:HUAIAN IMAGING DEVICE MFGR CORP

Dust removal and ash cleaning device for textile workshop

InactiveCN109157937AReach clearTo achieve the purpose of absorbing and exchanging the air with dust particles outside the equipmentCombination devicesMechanical cleaningMotor driveParticulate pollution
The invention discloses a dust removal and ash cleaning device for a textile workshop. The dust removal and ash cleaning device comprises a bottom plate; a water circulation box is fixedly disposed onone side of the upper surface of the bottom plate; a filter box is fixedly disposed on the top of the water circulation box; the top of the filter box communicates with a wind chamber; a water tank is fixedly disposed on the top of the wind chamber; a water pump is fixedly disposed on one side of the bottom of the inner wall of the water tank; a water pipe communicates with the lower part of thewater pump; the lower part of the water pipe penetrates through the bottom of the inner wall of the water tank and extends to the inside of the wind chamber; the tail end part, located inside the windchamber, of the water pipe communicates with an atomizing nozzle; a motor driving box is fixedly disposed at the center of the top of the inner wall of the wind chamber; the lower part of the motor driving box is fixedly connected with an output rotating shaft; and the lower part of the output rotating shaft is fixedly connected with a turbine fan. The invention relates to the technical field oftextile. The dust removal and ash cleaning device for the textile workshop is simple and light in structure, can remove dust and particulate pollution in air, and can also arrange the surface of textile gauze.
Owner:杭州大弘科技有限公司

Sterile automatic dispenser and using method thereof

The invention provides a sterile automatic dispenser and a using method thereof. The dispenser comprises a solvent bottle puncture needle, a base and a vial puncture needle, the solvent bottle puncture needle is provided with a first channel, the vial puncture needle is provided with a second channel and a third channel, the first channel is in communication with the second channel, the base is provided with a joint, the joint is used for being connected with a syringe, the third channel is communicated with the joint and the syringe, a suction hole is formed in the bottom end of the vial puncture needle, and the suction hole is connected to the second channel. The process of pumping and injecting a liquid medicine in the whole dispensing process is a sterile operation in a sealed environment, and the liquid medicine is not in contact with the outside air. In addition, it is only necessary to puncture an infusion bottle and a vial rubber stopper once, the entire process of manual dispensing is completed, and the damage of the particulate pollution caused by repeating puncturing of the rubber stopper to a human body is reduced.
Owner:JIANGSU DIWO BIOLOGICAL PROD

Air extractor, low-pressure chemical vapor deposition equipment and chemical vapor deposition method

The invention provides an air extractor, low-pressure chemical vapor deposition equipment and a chemical vapor deposition method. An air extractor is used for extracting a gas in a furnace tube of low-pressure chemical vapor deposition equipment and is characterized in that the air extractor comprises a first valve, a second valve and a third valve which are connected in parallel and are connected with an air exhaust opening through conduits, and a suction pump which is connected with the first, second and third valves through conduits, wherein the first valve, the second valve and the third valve respectively operate with the suction pump to reduce air pressure in the furnace tube, and the rate of reducing the air pressure in the furnace tube is decreased successively. By the utilization of the air extractor, the problem that particulate pollution in present low-pressure chemical vapor deposition equipment is severe can be improved.
Owner:CSMC TECH FAB2 CO LTD
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