Liquid-free sample traps and analytical method for measuring trace level acidic and basic AMC
By combining a liquid-free sample trap with a sintered hydrophilic material, the problems of insufficient low-megafraction detection limit and long sampling time of traditional sample traps are solved, enabling instant and efficient measurement of acidity and acidity in semiconductor manufacturing environments. Alkaline airborne molecular contaminants improve analytical accuracy and capture efficiency.
Active Publication Date: 2016-06-22
ENTEGRIS INC
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AI Technical Summary
Problems solved by technology
Several inherent disadvantages of these methods lead to inconsistent data and increased detection limits
Some proprietary solid-state protocols have been reported, but involve complex preparation, have high background signal and require 24-72 hour sampling duration, or are protected trade secrets not available as industry standard
[0005] Accordingly, there is a need for sample wells and analytical methods for measuring trace amounts of acidic and basic airborne molecular contaminants, especially those typically encountered in the semiconductor industry, which overcome such Disadvantages, low (e.g. sub-gigabit) detection limit and short (e.g. 4-8 hours) sampling period required
Method used
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[0029] Illustrative specific examples of the present invention are described below.
[0030]As used herein, the singular forms "a" and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to "an airborne molecular contaminant" may include a plurality of airborne molecular contaminants. Additionally, the plurality may comprise more than one of the same airborne molecular contaminant or a plurality of different airborne molecular contaminants.
[0031] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. Methods and materials similar or equivalent to those described herein can be used in the practice or testing of embodiments of the invention. Nothing herein is to be construed as an admission that the invention is not entitled to antedate this disclosure by virtue of prior invention. "Optional" or "optionally" means that t...
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Abstract
Described herein are liquid-free traps for trace levels of an acidic or basic airborne molecular contaminant in a gas. In one version of the invention described herein, the liquid- free trap comprises a housing, comprising an inlet and an outlet; a flow path between the inlet and the outlet; and a rigid sintered hydrophilic material situated in the flow path between the inlet and the outlet and sealed in the housing. The rigid sintered hydrophilic material is functionalized with from about 0.05 molar milliequivalents to about 10 molar milliequivalents of a basic species for trapping an acidic airborne molecular contaminant in the gas or from about 0.05 molar milliequivalents to about 10 molar milliequivalents of an acidic species for trapping a basic airborne molecular contaminant in the gas. Methods of using the liquid-free traps to detect or measure trace levels of an acidic or basic airborne molecular contaminant are also described.
Description
[0001] Related applications [0002] This application claims the benefit of U.S. Provisional Application No. 61 / 874,706, filed September 6, 2013, and U.S. Provisional Application No. 61 / 933,294, filed January 29, 2014. The entire teachings of these applications are incorporated herein by reference. Background technique [0003] The measurement of acidic and alkaline airborne molecular contamination (AMC) at the parts-per-million level is critical for process protection and yield control in semiconductor lithography and similar applications. Real-time monitoring solutions are highly desirable because they provide both instantaneous and continuous measurements. However, even the most advanced monitors cannot reach the detection limit in the low-per-million range and impose many limitations on the detection of acidic AMCs. [0004] Parts-per-million leveling can be achieved with discontinuous sampling using a sample well, but the currently accepted method uses a sample well fil...
Claims
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IPC IPC(8): G01N1/40G01N1/22
CPCG01N1/2205G01N1/2214G01N1/405G01N30/96G01N2030/025
Owner ENTEGRIS INC