Mask plate, evaporation device and evaporation method
A mask plate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of color mixing, large gap between the metal mask and the substrate, and achieve the effect of reducing the gap
Inactive Publication Date: 2016-06-29
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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Abstract
The invention discloses a mask plate, an evaporation device and an evaporation method. The mask plate comprises mask plate bodies, through holes are formed in the mask plate bodies, and grooves are formed in the positions, where the through holes are not formed, of the first surfaces of the mask plate bodies. During use, the through holes correspond to the color positions required to be coated, the mask plate bodies are close to a substrate, and light resistance separation pillars on the substrate are inserted into the positions of the grooves of the mask plate bodies, so that the gap between the upper end face of a metal mask and the substrate is reduced, and the color mixing problem caused by diffusing evaporation materials to other colors is effectively solved.
Application Domain
Vacuum evaporation coatingSputtering coating +1
Technology Topic
Color mixingEngineering +2
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