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Mask plate, evaporation device and evaporation method

A mask plate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of color mixing, large gap between the metal mask and the substrate, and achieve the effect of reducing the gap

Inactive Publication Date: 2016-06-29
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the above problems, embodiments of the present invention provide a mask plate, an evaporation device, and an evaporation method to solve the problem that the gap between the metal mask and the substrate is too large, and the evaporation material will diffuse to other parts to a certain extent. on the color, causing the problem of color mixing

Method used

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  • Mask plate, evaporation device and evaporation method
  • Mask plate, evaporation device and evaporation method
  • Mask plate, evaporation device and evaporation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] See figure 2 The mask includes a mask body 3, the mask body is provided with a through hole 31, and the upper end surface of the mask body is provided with a groove 32 for accommodating the photoresist isolation column on the surface of the substrate.

[0031] In this embodiment, the cross section of the groove 32 perpendicular to the direction of the mask body is an inverted trapezoid groove.

[0032] The specific vapor deposition method using the mask includes the following steps:

[0033] Provide a substrate 1 to be film-formed, which includes a region to be film-formed and a plurality of photoresist isolation columns 11;

[0034] Providing an evaporation source, the evaporation source and the mask plate are arranged oppositely and fixed in position;

[0035] The substrate 1 to be filmed and the mask body 3 are arranged in parallel and aligned so that the area to be filmed of the substrate 1 corresponds to the through hole 31 of the mask, and the photoresist isolation column ...

Embodiment 2

[0037] See image 3 , The mask includes a mask body, the mask body is provided with a through hole, and the upper end surface of the mask body is provided with a groove for containing the photoresist isolation column on the surface of the substrate. In this embodiment, the cross section of the groove 33 perpendicular to the direction of the mask body is square.

[0038] The specific vapor deposition method using the mask includes the following steps:

[0039] The substrate 1 to be filmed and the mask body 3 are arranged in parallel and aligned so that the area to be filmed of the substrate 1 corresponds to the through hole 31 of the mask, and the photoresist isolation column 11 of the substrate 1 corresponds to the mask. The square groove 33; move the substrate 1 to be filmed in the direction perpendicular to the mask body 3, so that the substrate 1 to be filmed is close to the mask to the bottom of the photoresist isolation column 11 inserted into the square groove 33; The platin...

Embodiment 3

[0041] See Figure 4 , The mask includes a mask body, the mask body is provided with a through hole, and the upper end surface of the mask body is provided with a groove for containing the photoresist isolation column on the surface of the substrate. In this embodiment, the cross section of the groove 34 perpendicular to the direction of the mask body is an arc groove.

[0042] The specific vapor deposition method using the mask includes the following steps:

[0043] The substrate 1 to be filmed and the mask body 3 are arranged in parallel and aligned so that the area to be filmed of the substrate 1 corresponds to the through hole 31 of the mask, and the photoresist isolation column 11 of the substrate 1 corresponds to the mask. The arc groove 34; move the substrate 1 to be filmed in the direction perpendicular to the mask body 3, so that the substrate 1 to be filmed is close to the mask to the bottom of the photoresist isolation column 11 inserted into the arc groove 34; The plat...

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Abstract

The invention discloses a mask plate, an evaporation device and an evaporation method. The mask plate comprises mask plate bodies, through holes are formed in the mask plate bodies, and grooves are formed in the positions, where the through holes are not formed, of the first surfaces of the mask plate bodies. During use, the through holes correspond to the color positions required to be coated, the mask plate bodies are close to a substrate, and light resistance separation pillars on the substrate are inserted into the positions of the grooves of the mask plate bodies, so that the gap between the upper end face of a metal mask and the substrate is reduced, and the color mixing problem caused by diffusing evaporation materials to other colors is effectively solved.

Description

Technical field [0001] The present invention relates to the field of evaporation technology, in particular to a mask, an evaporation device and an evaporation method. Background technique [0002] Organic light-emitting diodes (OLEDs) can emit light, have no viewing angle barriers, and have good low-temperature characteristics. Therefore, OLED displays have been considered as the most valuable new generation of flat panel displays after liquid crystal displays and plasma displays. [0003] Most of the OLED production process uses ITO (indium tinoxide) glass as the substrate, and uses evaporation equipment to successively deposit multiple films on the substrate. The OLED evaporation technology uses an evaporation source to fill the OLED material inside, and the evaporation source heats the material in a vacuum environment to sublimate or vaporize the material, and evaporate on the substrate through a metal mask. [0004] During the evaporation process, the evaporation source is below...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24C23C14/12
CPCC23C14/042C23C14/12C23C14/24
Inventor 薛丽红康润芳
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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