Digital control detecting system of piezoelectric hemispherical resonant micro-gyroscope

A technology of hemispherical resonance and micro gyroscope, which is applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, instruments, etc. It can solve the problems of no combination of digital signal processing system and no implementation plan, etc., to achieve improved detection level, cost reduction effect

Active Publication Date: 2016-06-29
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, the working method described in the literature does not give a specific implementation scheme, and the scheme adopted does not incorporate a digital signal processing system

Method used

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  • Digital control detecting system of piezoelectric hemispherical resonant micro-gyroscope
  • Digital control detecting system of piezoelectric hemispherical resonant micro-gyroscope
  • Digital control detecting system of piezoelectric hemispherical resonant micro-gyroscope

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0031] Such as figure 1As shown, the present embodiment provides a digital control detection system of a piezoelectric hemispherical resonant micro gyroscope, including a piezoelectric hemispherical resonant micro gyroscope module, a charge amplifier module, an ADC module, a DAC module and a digital signal processing module, wherein: the charge The amplifier module converts the charge signal generated by the piezoelectric hemispherical resonant micro-gyroscope module into a voltage signal and tran...

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Abstract

The invention provides a digital control detecting system of a piezoelectric hemispherical resonant micro-gyroscope. The digital control detecting system comprises a piezoelectric hemispherical resonant micro-gyroscope module, an ADC module, a DAC module, a digital signal processing module and an output or saving module, wherein a charge amplifier module converts a charge signal generated by the piezoelectric hemispherical resonant micro-gyroscope module into an voltage signal; the ADC module converts a received analog signal into a digital signal; the digital signal processing module processes the received digital signal, part of the processing result is displayed or saved, and part of the processing result is output as a feedback signal; the DAC module converts the digital feedback signal into an analog signal so as to feed back to the piezoelectric hemispherical resonant micro-gyroscope module; the piezoelectric hemispherical resonant micro-gyroscope module is excited or driven to produce a detection signal under the given feedback signal. By the digital control detecting system, stable-amplitude and stable-frequency control and digital detection of the piezoelectric hemispherical resonant micro-gyroscope are achieved.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a digital control and detection system of a piezoelectric hemispherical resonant micro-gyroscope. Background technique [0002] Micromechanical electronic system (MEMS) mainly includes several parts such as micro mechanism, micro sensor, micro actuator and corresponding processing circuit. MEMS has gradually become a high-tech frontier subject based on the latest achievements in the field of electronic communication and microelectronics technology by using various processing technologies, especially micro-processing technology. [0003] Piezoelectric hemispherical resonant micro gyroscope adopts piezoelectric material as the main part, adopts MEMS processing technology and technology, has the advantages of anti-overload, strong anti-shock ability, high working resonance frequency, high resolution, short start-up time, etc., and is widely used in military ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 张卫平汪濙海孙殿竣唐健邢亚亮魏志方
Owner SHANGHAI JIAO TONG UNIV
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