Thin-film evaporation method and device

Abstract

The invention discloses a thin-film evaporation method and a thin-film evaporation device. The thin-film evaporation method comprises the following steps: moving a line source which is parallel to a display substrate to be evaporated from a first end of the display substrate to a second end which is opposite to the first end of the display substrate at a constant speed in the direction which is perpendicular to the line source in a horizontal plane; shielding the line source by adopting a baffle; rotating the line source or the display substrate by 180 degrees in the clockwise direction or the anticlockwise direction in the horizontal plane; opening the baffle which shields the line source; returning the line source from the second end of the display substrate to the first end of the display substrate at a constant speed in the direction which is perpendicular to the line source in the horizontal plane. Therefore, the line source or the display substrate is rotated after being evaporated for the first time, so that the positions of the line source and the display substrate are rotated by 180 degrees relatively in the horizontal plane and are evaporated for the second time; compared with the prior art that the thin film evaporation is completed by keeping relative positions of the line source and the display substrate unchanged and performing a continuous round trip, the difference between the evaporating speeds at the two ends of the line source can be compensated, and the film thickness uniformity of the areas, corresponding to the two ends of the line source, on the display substrate is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a thin film evaporation method and device. Background technique [0002] In the production process of organic electroluminescent display panels, the organic thin film layer is deposited by the method of evaporation of line evaporation source, generally as Figure 1a with Figure 1b As shown, when the organic thin film is evaporated, the line source S is arranged opposite to the display substrate G to be evaporated, and the line source goes back and forth continuously once to complete the thin film evaporation. However, due to the uneven heating of the line source, it is easy to cause differences in the evaporation rates at both ends of the line source (the two ends of the line source refer to the areas near the two top ends of the line source), resulting in a difference in the evaporation rate on the display substrate corresponding to the two ends of the line source. The uneven...

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides a thin film evaporation method and device to solve the problem of uneven thickness of organic thin film evaporation in the prior art

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