Optical surface profile scanning system

Abstract

The invention relates to an optical surface profile scanning system, which comprises a light source device, an interference reflector, a first spectroscope and an image processing device. The light source device emits detection light beams. The first spectroscope simultaneously projects the detection light beams onto the surface of a to-be-detected object and the detection light beams are reflected by the first interference reflector respectively. After the detection light beams, projected onto the surface of the to-be-detected object and reflected by the first interference reflector, interfere with one another in the first spectroscope, the first spectroscope projects the surface interference image of the to-be-detected object to a first image sampling device. The image processing device receives the surface interference image of the to-be-detected object through the first image sampling device and then subtracts the surface interference image of the to-be-detected object by a reference interference image to obtain a difference image. Referring to the difference image, the surface profile of the to-be-detected object is established. According to the technical scheme of the invention, the surface profile of the to-be-detected object is measured in the non-contact manner, so that the to-be-detected object is free from being scratched. Meanwhile, no probe is adopted, so that the cost of the probe is saved.

Description

technical field [0001] The invention relates to an optical surface profile scanning system, which projects light beams to detect the profile of a surface to be measured. Background technique [0002] The probe-type measuring device is a device for measuring the surface profile of an object to be measured. The probe-type measuring device mainly includes a probe and a mobile platform, and an object to be measured is arranged on the mobile platform. When performing measurement operations, the probe directly contacts the surface of the object to be measured, and at the same time controls the mobile platform to move relative to the probe, so that the probe slides along a track on the surface of the object to be measured, and the probe is connected to the surface of the object to be measured. A controller of the needle detects the working parameters of the probe (such as the magnitude of the force) to determine the surface profile of the object to be tested. However, if the surfa...

AI Technical Summary

Problems solved by technology

However, if the surface hardness of the object to be measured is lower than that of the probe, or the force applied by the probe to the surface of the object to be measured is too large, the probe will often scratch the surface of the object to be measured, causing troubles in use; It will also be worn or damaged during measurement, so the probe is a consumable, and frequent replacement of the probe will also increase the cost of use

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