The invention discloses a three-dimensional microscopic surface profile measuring device based on a Greenough-type stereomicroscope and a method of the device. A camera and a
projector are installed in two imaging light paths of the Greenough-type stereomicroscope, so driving
structured light three-dimensional microscopic surface profile measuring is achieved. During measuring, when a measurement
system is calibrated, the method is combined with a phase shift profile measuring technology for non-
linear fitting calibration between height and a fringe phase on the
microscope projection light paths, then internal and external parameters of the camera light path are calibrated by means of a perspective model, accordingly a
homograph matrix of the camera is obtained, height distribution information of three-dimensional
point cloud data of a to-be-detected object is obtained according to the relation between the height and the phase, and then transverse position distribution of the three-dimensional
point cloud data of the object is obtained according to an equation set determined by the obtained
homograph matrix of the camera. The device and the method have the advantages of being simple, efficient and low in cost, and three-dimensional
point cloud data of tiny object surface can be quickly obtained by projecting multiple sets of phase shift period fringes and combining
system calibration parameters.