Fabry-Perot resonator cavity resonance luminescence cantilever beam system

Abstract

The invention discloses a Fabry-Perot resonator cavity resonance luminescence cantilever beam system. The system mainly consists of an photoelectric conversion component, a substrate, a fixed Fabry-Perot resonator cavity mirror, a resonator cavity inner light source, a sample chamber, a movable Fabry-Perot resonator cavity mirror, a resonator cavity outer light source, upper piezoelectric ceramics for excitation, a silicon micro-cantilever beam, lower piezoelectric ceramics for excitation and a probe. The Fabry-Perot resonator cavity resonance luminescence cantilever beam system can emit variable resonance frequency light which is modulated by vibration; and can detect spectral components of samples to be detected and cantilever beam flexure and deformation ability which is caused by external factors. Furthermore, the system can be applied to various technical fields, such as sensing and detection of chemical constituents and molecular biosamples, measurement of ultra-precision mechanical surface contour, physical spectrum constituent analysis and the like.

Description

technical field [0001] The invention belongs to the technical field of sensing and control, and particularly relates to a Fabry-Perot (Fabry-Perot) resonant cavity resonant light-emitting cantilever beam system. Background technique [0002] Cantilever beams, especially miniature cantilever beams, are special components in the field of microelectromechanical (MEMS) technology. Most of the micro-cantilevers used in atomic force microscopes are made of silicon nitride processed by integrated technology, while other existing micro-cantilever systems combined with sensors at home and abroad are in the application research stage. Their main structures include piezoresistive or piezoresistive The electrical micro-cantilever system, the main problem of the existing cantilever system is that the sensitivity of the system needs to be further improved, and the functions it has are too simple. There are two reasons: one is that the system itself has design limitations and processing e...

AI Technical Summary

Problems solved by technology

Most of the micro-cantilever beams used in atomic force microscopes are made of silicon nitride processed by integrated technology, while other existing micro-cantilever systems combined with sensors at home and abroad are in the application research stage. Their main structures include piezoresistive or piezoresistive Electric micro-cantilever system, the main problem of the existing cantilever system is that the sensitivity of the system needs to be further improved, and the functions are too simple

There are two reasons: one is that the system itself has design limitations and processing errors, and the other is that the signal extraction and detection methods are not advanced and perfect

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