Fabry-Perot resonator cavity resonance luminescence cantilever beam system

A Perot resonant cavity and cantilever beam technology, applied in the field of sensing and control, can solve problems such as design limitations, processing errors, and functional simplification

Active Publication Date: 2009-10-14
CHINA JILIANG UNIV
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Problems solved by technology

Most of the micro-cantilever beams used in atomic force microscopes are made of silicon nitride processed by integrated technology, while other existing micro-cantilever systems combined with sensors at home and abroad are in the application research stage. Their main structures include piezoresistive or piezoresistive Electric micro-cantilever sy

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  • Fabry-Perot resonator cavity resonance luminescence cantilever beam system
  • Fabry-Perot resonator cavity resonance luminescence cantilever beam system
  • Fabry-Perot resonator cavity resonance luminescence cantilever beam system

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Embodiment Construction

[0012] Such as figure 1 As shown, the Fabry-Perot resonant cavity resonant light-emitting cantilever beam system consists of a photoelectric conversion element 1, a substrate 2, a fixed mirror 3 in the Fabry-Perot resonant cavity, a light source in the resonant cavity 4, a sample chamber 5, and a moving mirror in the Fabry-Perot resonant cavity 6. The light source 7 outside the resonant cavity is composed of a piezoelectric ceramic 8, a silicon micro-cantilever beam 9, and a probe 11 for excitation. Wherein, the upper piezoelectric ceramic 8 for excitation includes an upper driving electrode, and the lower piezoelectric ceramic 10 for excitation includes a lower driving electrode.

[0013] The light source 7 outside the resonant cavity, the moving mirror 6 of the Fabry-Perot resonant cavity, the photoelectric conversion element 1 and the sample chamber 5 are reasonably arranged on the cantilever beam, and the system simultaneously outputs the interaction force induced by the c...

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Abstract

The invention discloses a Fabry-Perot resonator cavity resonance luminescence cantilever beam system. The system mainly consists of an photoelectric conversion component, a substrate, a fixed Fabry-Perot resonator cavity mirror, a resonator cavity inner light source, a sample chamber, a movable Fabry-Perot resonator cavity mirror, a resonator cavity outer light source, upper piezoelectric ceramics for excitation, a silicon micro-cantilever beam, lower piezoelectric ceramics for excitation and a probe. The Fabry-Perot resonator cavity resonance luminescence cantilever beam system can emit variable resonance frequency light which is modulated by vibration; and can detect spectral components of samples to be detected and cantilever beam flexure and deformation ability which is caused by external factors. Furthermore, the system can be applied to various technical fields, such as sensing and detection of chemical constituents and molecular biosamples, measurement of ultra-precision mechanical surface contour, physical spectrum constituent analysis and the like.

Description

technical field [0001] The invention belongs to the technical field of sensing and control, and particularly relates to a Fabry-Perot (Fabry-Perot) resonant cavity resonant light-emitting cantilever beam system. Background technique [0002] Cantilever beams, especially miniature cantilever beams, are special components in the field of microelectromechanical (MEMS) technology. Most of the micro-cantilevers used in atomic force microscopes are made of silicon nitride processed by integrated technology, while other existing micro-cantilever systems combined with sensors at home and abroad are in the application research stage. Their main structures include piezoresistive or piezoresistive The electrical micro-cantilever system, the main problem of the existing cantilever system is that the sensitivity of the system needs to be further improved, and the functions it has are too simple. There are two reasons: one is that the system itself has design limitations and processing e...

Claims

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Application Information

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IPC IPC(8): G12B21/22G01N21/35G01N13/00G02B26/08
Inventor 朱若谷魏涛
Owner CHINA JILIANG UNIV
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