Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device

Abstract

The invention discloses a three-dimensional microscopic surface profile measuring device based on a Greenough-type stereomicroscope and a method of the device. A camera and a projector are installed in two imaging light paths of the Greenough-type stereomicroscope, so driving structured light three-dimensional microscopic surface profile measuring is achieved. During measuring, when a measurement system is calibrated, the method is combined with a phase shift profile measuring technology for non-linear fitting calibration between height and a fringe phase on the microscope projection light paths, then internal and external parameters of the camera light path are calibrated by means of a perspective model, accordingly a homograph matrix of the camera is obtained, height distribution information of three-dimensional point cloud data of a to-be-detected object is obtained according to the relation between the height and the phase, and then transverse position distribution of the three-dimensional point cloud data of the object is obtained according to an equation set determined by the obtained homograph matrix of the camera. The device and the method have the advantages of being simple, efficient and low in cost, and three-dimensional point cloud data of tiny object surface can be quickly obtained by projecting multiple sets of phase shift period fringes and combining system calibration parameters.

Description

technical field [0001] The invention belongs to optical measurement and imaging technology, in particular to a three-dimensional microscopic surface profile measurement device and method based on a Greenough type stereo microscope. Background technique [0002] With the development of modern manufacturing technology, the miniaturization of electronic devices has become more and more popular and important. Miniaturization can enable devices to have more and more complex functions, allowing businesses to make miniaturized devices that are easy to carry, easy to transplant, and even implantable into the human body. For example, micro-electromechanical systems (MEMS) are produced by integrating mechanical components, electronic components, sensors and electric brake components together on a silicon chip. Devices similar to MEMS are used in scientific research and engineering applications. Has a very wide range of uses. At the same time, tiny devices like MEMS require strict mo...

AI Technical Summary

Problems solved by technology

However, the main problem of the 3D microscopic surface profile measurement method based on the telecentric lens is that the lower numerical aperture of the telecentric lens limits the resolution of the imaging system.

The main problem of the three-dimensional microscopic surface profile measurement method based on the common-objective stereo microscope is that the centrifugalization of the imaging light causes a large aberration, which makes the imaging optical path model complex and difficult to use a simple numerical matrix model. The optical path is accurately described and calibrated

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