Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device

A stereoscopic microscope and surface profile technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of limited imaging system resolution, large aberration of imaging light, complex optical path of imaging optical path model, etc., to achieve low cost and convenient Calibration, the effect of simple structure

Active Publication Date: 2016-10-12
NANJING UNIV OF SCI & TECH
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Problems solved by technology

However, the main problem of the 3D microscopic surface profile measurement method based on the telecentric lens is that the lower numerical aperture of the telecentric lens limits the resolution of the imaging system.
The main problem of the three-dimensional microscopic surface profile measureme

Method used

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  • Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device
  • Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device
  • Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device

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[0012] combine figure 1 , the present invention is based on a three-dimensional microscopic surface profile measurement device of a Greenough type stereomicroscope, including a camera 1, a projector 2, two microscope optical paths 3 and 4 including an enlarged optical path structure 8, a data transmission line 5, a computer 6, and a sample stage 7. Continuously adjustable light intensity attenuation sheet 9. Rotatable camera interface 10. The projector 2 is fixedly installed before the first microscope optical path 3 to form a projection optical path. The lens surface of the projector 2 is far from the lens surface of the first microscope optical path 3 0.2-0.8cm, the projector 2 moves up and down with the first microscope optical path 3, while the optical axis of the projector 2 remains parallel to the first microscope optical path 3 and is placed in front of the first microscope optical path 3, the projector 2 The projection distance and imaging magnification are realized by...

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Abstract

The invention discloses a three-dimensional microscopic surface profile measuring device based on a Greenough-type stereomicroscope and a method of the device. A camera and a projector are installed in two imaging light paths of the Greenough-type stereomicroscope, so driving structured light three-dimensional microscopic surface profile measuring is achieved. During measuring, when a measurement system is calibrated, the method is combined with a phase shift profile measuring technology for non-linear fitting calibration between height and a fringe phase on the microscope projection light paths, then internal and external parameters of the camera light path are calibrated by means of a perspective model, accordingly a homograph matrix of the camera is obtained, height distribution information of three-dimensional point cloud data of a to-be-detected object is obtained according to the relation between the height and the phase, and then transverse position distribution of the three-dimensional point cloud data of the object is obtained according to an equation set determined by the obtained homograph matrix of the camera. The device and the method have the advantages of being simple, efficient and low in cost, and three-dimensional point cloud data of tiny object surface can be quickly obtained by projecting multiple sets of phase shift period fringes and combining system calibration parameters.

Description

technical field [0001] The invention belongs to optical measurement and imaging technology, in particular to a three-dimensional microscopic surface profile measurement device and method based on a Greenough type stereo microscope. Background technique [0002] With the development of modern manufacturing technology, the miniaturization of electronic devices has become more and more popular and important. Miniaturization can enable devices to have more and more complex functions, allowing businesses to make miniaturized devices that are easy to carry, easy to transplant, and even implantable into the human body. For example, micro-electromechanical systems (MEMS) are produced by integrating mechanical components, electronic components, sensors and electric brake components together on a silicon chip. Devices similar to MEMS are used in scientific research and engineering applications. Has a very wide range of uses. At the same time, tiny devices like MEMS require strict mo...

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Application Information

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IPC IPC(8): G01B11/25
CPCG01B11/254
Inventor 陈钱胡岩左超顾国华张玉珍冯世杰陶天阳
Owner NANJING UNIV OF SCI & TECH
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