Electron microscope comprising microscope carrier

Abstract

The invention relates to an electron microscope which comprises a microscope carrier, a first drive unit, a flow stabilization unit and an electron source. The microscope carrier bears a to-be-measured object. The first drive unit drives a first liquid to flow along a first flow path, wherein the first flow path passes through the to-be-measured object. The flow stabilization unit is arranged on the first flow path to stabilize the flow of the first liquid, wherein the first liquid flows through the stabilization unit and the microscope carrier in sequence. The electron source provides an electron beam to the to-be-measured object.

Description

technical field [0001] The present invention relates to an electron microscope, and in particular to an electron microscope with a stage. Background technique [0002] Generally speaking, the most commonly used methods to observe the nanometer geometry of matter are to use atomic force microscopy (AFM) and electron microscope (electron microscope) and other equipment. When using an atomic force microscope to measure, the geometric shape of the object to be measured needs to be measured by a probe. This measurement method is not only easy to damage the probe tip, but also takes a long time to measure, and the sample measurement range is small. The electron microscope does not have the above problems. [0003] In terms of scanning electron microscope (SEM), it can be used to observe liquid samples. When observing a liquid sample, it is necessary to drive the liquid to flow through the film used to carry the sample to take away the metabolites of the sample, or use the liquid ...

AI Technical Summary

Problems solved by technology

In addition, an additional driving source for driving the liquid flow will increase the equipment volume and cost of the electron microscope

Images