Draining device for vacuum pipeline of thinning machine

Abstract

The invention discloses drainage equipment for a vacuum pipeline of a thinning machine of the electronics industry and particularly discloses a draining device for the vacuum pipeline of the thinning machine. The draining device comprises a vacuum water storage tank (1); the upper end of one side of the vacuum water storage tank (1) is connected with a vacuum pump body (2); the lower end of the vacuum water storage tank (1) is connected with a draining pump body (3); the draining pump body (3) is a screw pump body; the other side of the vacuum water storage tank (1) is connected with the vacuum pipeline (4) of the thinning machine; the free end of the vacuum pipeline (4) of the thinning machine is provided with a vacuum chamber body (5); a sucking disc (6) is arranged at the upper part of the vacuum chamber body (5); a grinding flake (7) is arranged on the sucking disc (6). The draining device has the beneficial effects of being simple in structure, convenient to operate and capable of separating cooling liquid from air so as to prevent the cooling liquid from entering the vacuum pipeline during a grinding process, so the problem of damage of the vacuum pump is prevented.

Description

Technical field [0001] The invention relates to the technical field of vacuum pipeline drainage equipment for thinning machines in the electronics industry, in particular to a drainage device for vacuum pipelines for thinning machines. Background technique [0002] Thinning machining is to use various types of grinding wheels to grind various wafers. Thinning is a necessity in the processing of wafers. In the process of thinning and grinding, due to the frictional heat generated, it will affect the chemical properties, mechanical properties, and structure of the film. Therefore, cooling fluid (such as water or other liquids) must be added for cooling. However, the frictional heat generated, the faster the cooling, the better. Some people increase the coolant flow rate, and some people change the cooling performance of the liquid by adding other objects to the liquid, all for the purpose of quickly cooling hot spots; however, the processing cost is high, and the substances added ...

AI Technical Summary

Problems solved by technology

Therefore, in view of the above problems, we have developed a drainage device for the vacuum pipeline of the thinning machine with simple structure and easy operation, which separates the coolant from the air to prevent the coolant from entering the vacuum pipeline during the grinding process, resulting in damage to the vacuum pump.

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