Micro displacement mechanism, moving mirror interferometer and infrared spectrometer using moving mirror interferometer
A moving mechanism and interferometer technology, applied in the field of infrared spectrometers, can solve the problems of large weight and volume, high cost, and achieve the effects of high-efficiency optical structure, performance guarantee, good stability and repeatability
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[0036] figure 1 Schematic diagram of the structure of the micro-motion mechanism provided by the embodiment of the present invention. Such as figure 1 As shown, the micro-motion mechanism includes a driving mechanism and a driven mechanism.
[0037] Such as figure 1 As shown, the active mechanism includes: active elastic reed set 1001, active mover 1002, inclined block 1003 and active stator 1004; the driven mechanism includes: driven elastic reed set 1101, mirror base 1102, driven Block 1103, driven stator 1104 and moving mirror module.
[0038] See figure 1 The active end of the active elastic reed set 1001 is provided with the active mover 1002 and the inclined block 1003 , and the fixed end of the active elastic reed set 1001 is fixed by the active stator 1004 .
[0039] Depend on figure 1 It can be seen that the movable end of the driven elastic reed set 1101 is provided with the mirror base 1102, the driven block 1103 and the moving mirror module are fixed at the m...
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