Preparation method of pdms microwell array template
A technology of microhole array and template, which is applied in the direction of manufacturing tools, welding equipment, laser welding equipment, etc., can solve the problems of complex steps, difficulty in manufacturing microcolumn molds, easy detachment of microcolumn and substrate, and achieve corrosion resistance Good performance, wide application range, good chemical stability
Active Publication Date: 2018-11-09
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology
This method undergoes multiple spin-coating lithography, the steps are complicated, and the SU8 mold can only be used once, so it is impossible to prepare PDMS templates in large quantities; because the SU-8 photoresist microcolumn and the substrate are easy to fall off, it is difficult to manufacture large-area microstructures. Group column mold
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[0026] Step 1. Select a metal sheet: select a stainless steel 304 metal sheet, the size is 60mm x 60mm, the thickness is 0.2mm, and the surface of the metal sheet is required to be smooth and flat;
[0027] Step 2. Laser processing the micro-hole array: carry out laser processing of array through-holes on the metal sheet, with a diameter of 100 μm, a hole spacing of 300 μm, and a micro-hole array area of 50 mm x 50 mm to obtain a micro-hole array metal sheet 3, such as image 3 ;
[0028] Step 3. Make a group hole channel mold: stick tape 4 on one side of the light outlet of the micro-hole array metal sheet 3 during laser processing, put it into the molding container 1, put the tape-attached side down, and put it on the molding container 1. close fit;
[0029] Step 4. Pour glue: the epoxy resin material and the curing agent are prepared according to 2:1, and the prepared epoxy resin glue 2 is poured into the molding container 1;
[0030] Step 5. Evacuation: Put the molding...
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Abstract
The invention relates to a preparation method for a PDMS micropore array mold plate and belongs to the field of minuteness manufacturing. The preparation method comprises the steps that a, a micropore array metal sheet (3) is manufactured through laser machining; b, the micropore array metal sheet (3) is filled with epoxy resin glue (2), and the epoxy resin glue and the micropore array metal sheet are integrally combined after solidification; c, the micropore array metal sheet (3) is used as an anode, a metal material is preliminarily removed with an electrochemical machining method, and after electrochemical machining is finished, the micropore array metal sheet is put into hydrochloric acid to be corroded so as to remove residual metal; and d, a epoxy resin mold (9) is filled with PDMS glue (10), and the PDMS glue is separated from adhesive tape (11) and the epoxy resin mold (9) after solidification. According to the preparation method for the PDMS micropore array mold plate, epoxy resin is used as a micro-group column mold, and the PDMS micropore array mold plate can be prepared on a large scale; and the prepared PDMS micropore array mold plate can be used for large-area electrochemical machining of micropore arrays, and the machining locality is improved.
Description
technical field [0001] The invention relates to a method for preparing a polydimethylsiloxane (PDMS) micropore array template, which belongs to the field of microfabrication. Background technique [0002] Polydimethylsiloxane (PDMS) is a kind of silicone material, which is an elastic high molecular polymer. Usually, it is a mixture of PDMS prepolymer and curing agent according to a certain volume ratio (mass ratio). aggregated. Dimethicone in liquid state is a viscous liquid, called silicone oil, which is a mixture of organosiloxanes with chain structures of different degrees of polymerization. Dimethicone in solid state is a kind of silica gel, which is non-toxic , Hydrophobic elastomers. It has good reproducibility, chemical stability, insulation, and corrosion resistance, suitable for processing various biochemical reaction chips, and is widely used in micro-contact imprinting, microfluidic patterning, template-assisted patterning and other technologies in MEMS. PDMS m...
Claims
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IPC IPC(8): B29C33/38B29C33/40B23K26/382
CPCB23K26/382B29C33/3842B29C33/40
Inventor 侯志保曲宁松潘永强
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS