Multi-driven three-degree-of-freedom leaf spring type micro-nano operating platform and method

A technology of operating platform and degrees of freedom, which is applied to parts of instruments, program-controlled manipulators, instruments, etc., can solve problems such as the inability to realize the Z-axis rotation degree of freedom, the inability to realize the Z-axis rotation degree of freedom, and the difficulty in realizing large-span travel, etc. Achieve the effect of widening the scope of use, overcoming the transmission error, and improving the guiding characteristics

Active Publication Date: 2016-11-16
SANYING MOTIONCONTORL TIANJIN INSTR CO LTD
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Problems solved by technology

[0004] In the prior art, a micro-nano transmission platform is proposed. The platform realizes the linear degrees of freedom in the XYZ three axes and the rotational degrees of freedom in the XY direction by means of the space hinge structure. The space hinge structure in this patent is complex and cannot realize the Z-axis. Rotational degree of freedom, which is very important in micro-nano operations, and it is difficult to achieve large-span travel due to the flexible hinge structure
[0005] There is also a four-dimensional orthogonal structure micro-nano operation table. This platform realizes the linear degree of freedom in the XYZ direction and the rotational degree of freedom in the Y-axis direction with the help of piezoelectric ceramic drivers. rotational degrees of freedom

Method used

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  • Multi-driven three-degree-of-freedom leaf spring type micro-nano operating platform and method
  • Multi-driven three-degree-of-freedom leaf spring type micro-nano operating platform and method
  • Multi-driven three-degree-of-freedom leaf spring type micro-nano operating platform and method

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Embodiment 1

[0040] like figure 1 , figure 2As shown, a multi-drive three-degree-of-freedom leaf spring micro-nano operating platform adopts a four-drive method in this embodiment. The platform structure includes: a fixed platform 1, and the fixed platform 1 is processed by wire cutting of integrated materials , four driving mechanisms with the same structure are evenly distributed around the circumference of the fixed platform 1. The center of the fixed platform 1 is provided with a mobile platform 26. The part of the first driving mechanism that removes the driving power source is the first leaf spring unit, and the first leaf spring The unit consists of a first leaf spring (auxiliary leaf spring) 3, a second leaf spring (auxiliary leaf spring) 4, a third leaf spring (auxiliary leaf spring) 5, a fourth leaf spring (auxiliary leaf spring) 6 and a first guide plate Spring 7, the first leaf spring 3, the second leaf spring 4, the third leaf spring 5, the fourth leaf spring 6 and the first...

Embodiment 2

[0045] like Figure 7 As shown, the flexible auxiliary leaf spring is connected in parallel and symmetrically arranged at the output end of the driving power source. This structural design can effectively increase the stiffness and improve the bandwidth of the entire micro-nano platform, which is suitable for high-bandwidth and small-travel occasions.

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Abstract

The invention discloses a multi-driven three-degree-of-freedom leaf spring type micro-nano operating platform and method. The platform comprises a mobile platform for placing a mobile object, wherein driving mechanisms are arranged at four corners or extended edges of four edges of the mobile platform; the driving mechanisms are arranged in the positions of four corners in a quadrangle shape; one of the driving mechanisms is matched with another one to drive the mobile platform to move in X-axis or Y-axis and rotate around Z-axis; each driving mechanism comprises a guide leaf spring connected to the mobile platform, the guide leaf spring is connected to a driving power source, and at least one auxiliary leaf spring is arranged on each side of the guide leaf spring. The platform disclosed by the invention has he beneficial effects that as four leaf spring units are circumferentially arranged, the rotating degree of freedom of the mobile platform around the Z-axis can be realized, so that the range of application of the micro-nano operating platform is expanded; meanwhile, by way of an overdrive design mode, transmission errors caused by errors of structural shapes due to machining errors can be effectively overcome.

Description

technical field [0001] The invention relates to a micro-nano operating device, in particular to a multi-drive three-degree-of-freedom leaf spring type micro-nano operating platform and method. Background technique [0002] With the development of ultra-precision machinery manufacturing, micro-robot operation, precision optical measuring instruments, and biomedical micro-manipulation in recent years, it has sub-micron or even nano-level resolution, millimeter-level or centimeter-level large-span multi-degree-of-freedom micro-nano operation The design of the platform has increasingly become a key technology that limits the development of the above-mentioned fields. In the 1980s, A.Midha and L.L.Howell proposed the concept of compliant mechanisms, which greatly promoted the development of micro-nano operating platform design methods and opened up a new design concept. [0003] The document Design of a Large Range XY Nanopositioning System proposes a two-degree-of-freedom micro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/12G12B5/00
CPCB25J9/109B25J9/12G12B5/00
Inventor 闫鹏鲁帅帅
Owner SANYING MOTIONCONTORL TIANJIN INSTR CO LTD
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