Anti-static liquid coating system
An antistatic liquid and coating technology, which is applied in coatings, devices for coating liquid on the surface, etc., can solve the problems of graphic discharge damage on the substrate, affecting product yield, and little improvement in product static damage
Active Publication Date: 2019-05-21
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
[0002] The production process of liquid crystal display includes cleaning the glass substrate (Cleaner), coating the glass substrate with photoresist (Coater), passing through the vacuum drying unit (VCD), baking (Pre-bake), and then entering the exposure machine (Exposure ), use MASK to define the pattern on the photoresist on the glass substrate; and then display the pattern through the development process (Developer). In the exposure line equipment, coating equipment or exposure machine equipment, the substrate needs to be placed on the platform, and vacuum adsorption The substrate is fixed on the platform; after the substrate finishes the coating or exposure process, there will be strong static electricity during the peeling process between the substrate and the platform. The polarities of the electrodes are different, and they will adsorb each other, resulting in the adhesion of fragments during the peeling process. The current method is to manually coat a layer of anti-static liquid on the platform.
This method requires regular shutdown, which will affect the production efficiency of the equipment, and the frequent entry of personnel into the equipment will cause pollution inside the equipment and affect the product yield. Although the problem of adhered fragments can be improved to a certain extent, it is actually harmful to the product due to electrostatic damage. little improvement
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[0018] The inventive concepts will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the inventive concepts are shown. Advantages and features of the inventive concept and methods for realizing them will be apparent from the following exemplary embodiments which will be described in more detail with reference to the accompanying drawings. It should be noted, however, that the inventive concept is not limited to the following exemplary embodiments, and may be implemented in various forms. Therefore, the exemplary embodiments are provided only to disclose the inventive concepts and to let those skilled in the art understand the scope of the inventive concepts. In the drawings, embodiments of the inventive concept are not limited to the specific examples provided herein.
[0019] Unless otherwise defined, all terms (including technical terms and scientific terms) used in the embodiments disclosed in the present...
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The invention provides an antistatic fluid coating system which is used for coating an antistatic fluid to a substrate. The antistatic fluid coating system comprises a coating device; the coating device comprises a container used for containing the antistatic fluid, a fluid spray device, a plurality of roller wheels and a coating roller; the plurality of the roller wheels rotate for driving the substrate to move; the fluid spray device is used for driving the antistatic fluid to spray to the coating roller; and the coating roller is in contact with the back side of the substrate and moves along with the substrate to roll, so that the antistatic fluid is coated to the back side of the substrate.
Description
technical field [0001] The invention relates to the field of liquid crystal display tools, in particular to an antistatic liquid coating system. Background technique [0002] The production process of liquid crystal display includes cleaning the glass substrate (Cleaner), coating the glass substrate with photoresist (Coater), passing through the vacuum drying unit (VCD), baking (Pre-bake), and then entering the exposure machine (Exposure ), use MASK to define the pattern on the photoresist on the glass substrate; and then display the pattern through the development process (Developer). In the exposure line equipment, coating equipment or exposure machine equipment, the substrate needs to be placed on the platform, and vacuum adsorption The substrate is fixed on the platform; after the substrate finishes the coating or exposure process, there will be strong static electricity during the peeling process between the substrate and the platform. The polarities of the electrodes ...
Claims
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IPC IPC(8): B05C1/08B05C9/12
CPCB05C1/0813B05C9/12
Inventor 欧阳志华张从领
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD