Method and system for testing bonding degree at any position on wafer product

A technology of any position and test method, applied in semiconductor/solid-state device test/measurement, electrical components, circuits, etc., can solve the problem of inability to evaluate the degree of bonding, and achieve the effect of simple test method, reduced efficiency and wide application range

Active Publication Date: 2019-04-30
WUHAN XINXIN SEMICON MFG CO LTD
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the blade can only be inserted into the gapped circumference of the edge of the trimmed wafer, this method can only evaluate the bonding degree of the wafer very close to the edge, usually a few μm from the edge, and cannot The degree of bonding is evaluated at the center of the wafer and most other areas near the center

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  • Method and system for testing bonding degree at any position on wafer product
  • Method and system for testing bonding degree at any position on wafer product

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Embodiment Construction

[0038] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0039] figure 1 It is a schematic flow chart of a method for testing the degree of bonding at any position on a wafer product in Embodiment 1, comprising the following steps:

[0040] Step 1. Select the area to be tested on the bonded wafer that needs to be tested for the degree of bonding. The area to be tested can be located at any position on the wafer, such as the edge of the wafer, the center of the wafer, or an area close to the center of the wafer.

[0041] In step 2, the area to be tested is cut off from the entire wafer by a chip cutting method in the chip packaging process. In this embodiment, the region to be tested is cut off from the entire wafer by using a laser method. In other embodiments, a saw bla...

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Abstract

The invention particularly relates to a method and system for testing the bonding degree of any position on a wafer product. The method comprises the following steps: selecting a region to be tested on the bonded wafer; cutting the region to be tested from the entire wafer by chip cutting; bonding two wafers at the edge of the cut wafer sample A slit is formed at the slit; a blade is inserted into the slit, and an infrared light source is used to irradiate the slit to form interference fringes, and the bonding degree of the area to be tested is calculated according to the interference fringes. The present invention provides a wafer bonding degree testing method and system that can be generally applied to three-dimensional chip products. By cutting the area to be tested of the wafer by means of a chip cutting process, the bonding degree of any position of the wafer is realized. The test not only breaks the limitation that the traditional method can only test the bonding degree at the extreme edge of the wafer, but also does not need to introduce a new process, and will not reduce the efficiency of the wafer bonding degree test.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method and system for testing the bonding degree of any position on a wafer product. Background technique [0002] In the three-dimensional chip (3D-IC) technology, such as the process of preparing BSI, UTS and other products, two wafers need to be bonded, and the degree of bonding of the wafers has a great impact on the entire process and the performance of the final product. Therefore, The degree of bonding needs to be evaluated after the bonding process. The prior art generally adopts the method of inserting a blade to evaluate the bonding degree at the edge of the entire wafer, specifically: a thin blade of known thickness is inserted at the edge (edge) of the wafer processed by trimming, according to The interference fringes formed after the irradiation of the infrared light source are combined with the formula to calculate the surface energy at the insertion bl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66
CPCH01L22/12H01L22/30
Inventor 仝金雨李辉李品欢李桂花肖科
Owner WUHAN XINXIN SEMICON MFG CO LTD
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