Verticality error measurement method used for orthogonal guide rail platform

Abstract

The invention discloses a verticality error measurement method used for an orthogonal guide rail platform. The method comprises the following steps of placing an optical square brick on an X axis slide block of an X axis slide rail of a measured orthogonal guide rail platform and successively overturning the optical square brick according to an assigned angle so that each cylindrical surface of the optical square brick is supported on the X axis slide block respectively; detecting included angles of the optical square brick and an X axis, and the optical square brick and a Y axis when each cylindrical surface of the optical square brick is supported on the X axis slide block and acquiring 8 included angles; and according to a formula (1), calculating verticality angles of movement axes X and Y of the measured orthogonal guide rail platform. By using the method of the invention, verticality measurement efficiency and precision can be greatly increased. And the method possesses advantages that a measurement error is not influenced by a standard component; measured equipment versatility is good; and operation of a measured process is simple and easy and measured objects are wide.

Description

technical field [0001] The invention relates to precision measurement technology, in particular to a verticality error measurement method for an orthogonal guide rail platform. Background technique [0002] The perpendicularity error accounts for more than 30% of all geometric errors for the orthogonal guide rail motion platform which is most sensitive to the verticality error. For a general precision motion platform, all geometric errors of the motion axis can be directly detected and separated by using a dual-frequency laser interferometer, except for the roll angle error. For example, the XL-80 dual-frequency laser interferometer of the British Renishaw company has a resolution of 1nm and a measurement accuracy of ±0.5ppm. It can be seen that the measurement accuracy of this instrument cannot meet the measurement requirements of high-precision verticality errors, so other methods must be used for geometric error detection. [0003] The methods commonly used to measure v...

AI Technical Summary

Problems solved by technology

The error separation method is commonly used in measuring the straightness of guide rails, and there are relatively few studies on verticality error measurement at home and abroad, and there is even no special literature for detailed analysis and introduction of measuring guide rail verticality based on error separation.

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