Measuring device and method for azimuth angle of grating scoring knife
A technology of grating scribing knife and measuring device, which is applied in the field of grating, can solve the problems of low efficiency, low accuracy, high efficiency, and unfavorable high-quality diffraction grating, and achieve the effect of high efficiency and high accuracy
Active Publication Date: 2018-12-07
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
In the prior art, there is no direct measurement device for the azimuth angle of the grating scribing knife, and the adjustment process is prone to repeated adjustments, with low accuracy and low efficiency. unfavorable
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Embodiment Construction
[0031] The core of the invention is to provide a measuring device for the azimuth angle of the grating scribe knife, so as to improve the measuring efficiency. Another core of the present invention is to provide a measurement method for the above measurement device.
[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0033] Such as figure 1 and figure 2 As shown, the present invention discloses a measuring device for the azimuth angle of a grating marking knife, which includes a mounting base 7, a rotating...
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The invention discloses a measuring device for the azimuth angle of a grating marking knife and a measuring method thereof. The fixed part and the rotating part have angular scales along the circumference, and the mounting base is installed on the rotating part; the observation mirror has a positioning mark at the reference position, and the observation mirror can be opposite to the rotating table. When using this device, install the tool holder with grating scoring knife on the positioned mounting base, and the mounting base is fixed on the rotating part, adjust the position of the rotating table to the reference position, so that the rotating table is opposite to the observation mirror, Then rotate the rotating part so that the edge of the grating marking knife coincides with the positioning mark. At this time, the rotation angle of the rotating part relative to the fixed part is the azimuth angle of the grating marking knife. The measuring device in this application can directly measure the azimuth without repeated operations, and has high accuracy and high efficiency.
Description
technical field [0001] The invention relates to the technical field of gratings, in particular to a measuring device and a measuring method for the azimuth angle of a grating scribing knife. Background technique [0002] Diffraction grating is a precision light-splitting element. The principle of mechanically scribing diffraction grating is that the grating scribing knife extrudes a series of regular groove-shaped grating lines at equal intervals on the grating substrate coated with aluminum film or gold film. The parameters of the grating scribing knife affect the groove shape of the grating scribe line, and then affect the grating performance indicators such as diffraction efficiency, stray light, and ghost lines of the scribed grating. The parameters that need to be adjusted in the parameters of the grating scribing knife before scribing the diffraction grating include azimuth angle, orientation angle and pitch angle. The development of high-quality diffraction gratings r...
Claims
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IPC IPC(8): G01C1/00
CPCG01C1/00
Inventor 唐玉国糜小涛吉日嘎兰图冯树龙张善文齐向东巴音贺希格
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI