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Central frequency adjustable substrate integrated waveguide filter and manufacturing method thereof

A substrate-integrated waveguide and center frequency technology, applied in the filter field, can solve the problems of large loss, low integration, and no small filter modules, etc., to achieve reduced loss, high reliability, increased convenience and possibility Effect

Active Publication Date: 2016-12-21
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0009] The technical problem to be solved by the present invention is that the center frequency adjustment of the existing substrate integrated waveguide filter has a small degree of integration and a large loss, and there is no small filter module with a center frequency of 27 GHz and low insertion loss that can be directly used.

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  • Central frequency adjustable substrate integrated waveguide filter and manufacturing method thereof
  • Central frequency adjustable substrate integrated waveguide filter and manufacturing method thereof
  • Central frequency adjustable substrate integrated waveguide filter and manufacturing method thereof

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Embodiment Construction

[0028] In general, the present invention proposes a substrate-integrated waveguide filter with adjustable center frequency. According to the method of electrical adjustment of the waveguide resonant frequency, the conductive column is loaded in the filter resonant cavity, and the switch of the conductive column is realized through the conductive film bridge to realize the disturbance of the resonant frequency of the resonant cavity, thereby realizing the substrate integrated waveguide filter The adjustment of the center frequency of the filter greatly increases the application range and calibrability of the filter.

[0029] In terms of the manufacturing method, the present invention utilizes the MEMS process to manufacture the conductive film bridge, that is, the present invention uses the conductive film bridge switch to adjust the center frequency of the substrate integrated waveguide filter through the manufacturing method of the MEMS process and the wafer-level process. Th...

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Abstract

The invention provides a central frequency adjustable substrate integrated waveguide filter and a manufacturing method thereof. According to an electric adjustment method of the waveguide resonant frequency, tuning conductive poles loaded in a filter resonant cavity, The resonant frequency of the resonant cavity is disturbed, a switch composed of a conductive film bridge is formed on the top metal layer to gate the tuning conductive poles, and the central frequency of the substrate integrated waveguide filter is adjusted. The application range and adjustability of the filter are improved greatly.

Description

technical field [0001] The invention belongs to the technical field of filters, in particular to a substrate integrated waveguide filter with adjustable center frequency and a manufacturing method thereof. Background technique [0002] For high-frequency communication system applications, such as: the high-frequency window of 5G communication, due to the frequency above 27GHz, the traditional microstrip filter has a relatively large in-band insertion loss, and the substrate integrated waveguide (SIW) realizes high-frequency filters due to radiation The loss is very small, so its in-band insertion loss can be controlled in a small range, which is very suitable for application in miniaturized base stations. [0003] The filter is a key component in the radio frequency system. Due to the increase of the operating frequency, the traditional microstrip filter is difficult to meet the requirements of the current radio frequency system due to the increase in loss. Therefore, the su...

Claims

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Application Information

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IPC IPC(8): H01P1/207H01P1/208H01P11/00
CPCH01P1/207H01P1/2088H01P11/007
Inventor 苏华伟张静李君靖向萌曹立强
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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