Central frequency adjustable substrate integrated waveguide filter and manufacturing method thereof
A substrate-integrated waveguide and center frequency technology, applied in the filter field, can solve the problems of large loss, low integration, and no small filter modules, etc., to achieve reduced loss, high reliability, increased convenience and possibility Effect
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[0028] In general, the present invention provides a substrate integrated waveguide filter with an adjustable center frequency. According to the method of electrical adjustment of the resonant frequency of the waveguide, a conductive column is loaded in the filter cavity, and the switch of the conductive column is realized by a conductive film bridge to realize the disturbance of the resonant frequency of the resonant cavity, thereby realizing the substrate integrated waveguide filter The adjustment of the center frequency of the filter greatly increases the application range and calibrability of the filter.
[0029] In terms of manufacturing methods, the present invention uses MEMS technology to manufacture conductive film bridges, that is, the present invention uses MEMS technology and wafer-level manufacturing methods to adjust the center frequency of the substrate integrated waveguide filter by using conductive film bridge switches. Therefore, the present invention integrates ...
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