A Time Interval Constraint Method for Controlling Machine Automatic Test Machine

Abstract

The invention provides a time interval constraint method for controlling automatic machine measurement of a machine bench. The method includes following steps: the machine bench in need of automatic machine measurement is provided with a corresponding idle time constrained condition in a manufacture execution system; when a batch of cargos arrive at the machine bench, a machine bench automation system sends a constraint determination request to the manufacture execution system; the manufacture execution system determines whether the machine bench is constrained according to the set constrained condition and returns a determination result to the machine bench automation system; and the machine bench automation system controls whether automatic machine measurement is performed on the machine bench according to the determination result. The method can be flexibly applied to all process machine benches in a production line, the management and control of automatic measurement of the process machine benches can be realized, the idle time of the machine bench can be constrained, the constraint time can be delayed according to the scheduling of the production line, the product period is reduced, and the production efficiency and the product yield rate are increased.

Description

technical field [0001] The invention belongs to the field of semiconductor manufacturing, and relates to a time interval constraint method for controlling an automatic machine tester. Background technique [0002] In the process of using the product program, the user can only use the matching Monitor recipe (testing machine program) for machine measurement. And when the interval between the last use of the Monitor recipe and the current time exceeds a certain limit, it is not allowed to use the product program to continue the process on the machine. Therefore, each production machine needs to control the idle time of the machine Monitor recipe. This control mechanism used to be controlled manually, but now it is hoped to realize the control through the system. The engineer sets the idle time constraint conditions for each machine. When these conditions are met, it is hoped that the machine will not continue the process, but make corresponding measurements to check whether t...

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a time interval constraint method for controlling the automatic test machine of a machine, which is used to solve the problem that the automatic test machine time of the machine in the prior art cannot be flexibly adjusted, resulting in machine The idle time of the station is prolonged, which affects the production cycle time of the product

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