Metal wire manufacturing method of flexible substrate
A metal wire, flexible substrate technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as easy breakage, achieve stress relief, improve bending resistance and reliability, process Simple steps to achieve the effect
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[0022] In order to further illustrate the technical means and functions adopted by the present invention to achieve the intended purpose of the invention, the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments.
[0023] Such as figure 1 As shown, the metal wire manufacturing method of the flexible substrate of the present invention includes:
[0024] Step 1: preparing a polyimide solution 20 containing air bubbles 21;
[0025] Step 2: Coating the polyimide solution 20 containing bubbles 21 on a substrate 10 (such as figure 2 shown);
[0026] Step 3: Baking and curing the polyimide solution 20. During the baking and curing process, the bubbles 21 gradually gather to the surface layer of the polyimide solution 20 and burst, forming a substrate with multiple concave holes on the surface. polyimide layer 20';
[0027] Step 4: Deposit metal layer 30 (such as image 3 shown);
[0028] Step 5: patterning ...
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