Film transistor panel structure and manufacturing method thereof

A technology of thin film transistor and manufacturing method, which is applied in the field of thin film transistor panel structure and manufacturing, and can solve the problems of large parasitic capacitance of pixels, etc.

Active Publication Date: 2017-01-18
IRAY IMAGE TECH TAICANG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the prior art described above, the purpose of the present invention is to provide a thin film transistor panel structure and manufacturing method, which is used to solve the problem of large parasitic capacitance of pixels on the TFT panel in the prior art

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  • Film transistor panel structure and manufacturing method thereof
  • Film transistor panel structure and manufacturing method thereof
  • Film transistor panel structure and manufacturing method thereof

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Embodiment Construction

[0052] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0053] It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the compo...

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Abstract

The invention provides a film transistor panel structure and a manufacturing method thereof. The structure comprises a first metallic layer as a scan line, a first passivation layer on the first metallic layer, an organic film on the first passivation layer, a second passivation layer on the organic film, through holes passing through the first passivation layer, the organic film and the second passivation layer, a second metallic layer which contacts with the first metallic layer through the through holes and serves as a grid electrode, a third passivation layer covering the grid electrode, a semiconductor active layer on the third passivation layer, and a third metallic layer which serves as a data line, a source electrode, a drain electrode and a pixel electrode. The distance between the two poles of a flat parasitic capacitor and a parallel parasitic capacitor in pixels can be increased, the parasitic capacitance is reduced, pixel noise is also reduced, and the pixel performance is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a structure and a manufacturing method of a thin film transistor panel. Background technique [0002] A thin film transistor area array driving panel of a flat panel display or a thin film transistor area array sensor panel of an X-ray sensor may be collectively referred to as a TFT (Thin Film Transistor, thin film transistor) panel. In the semiconductor TFT panel process, thin films of different substances are deposited on the flat surface of glass or other materials, and are patterned into various circuits to achieve various functions, such as the driving of liquid crystal display panels, the driving of organic light-emitting diode display panels, The sensing function of the X-ray flat panel detector panel, etc. The basic functional unit of a TFT panel is a pixel, and each pixel includes a scanning line, a data line, and a thin film transistor switching device (hereinafter co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/12H01L21/77
CPCH01L27/124H01L27/1296
Inventor 朱翀煜金利波方志强
Owner IRAY IMAGE TECH TAICANG CO LTD
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