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Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method

A technology of closed-loop detection and silicon micro-gyroscope, which is applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, and measuring device. It can solve problems such as unclear structural design methods and difficult acquisition of loop parameters, and achieve simple design. , stable structure and parameters, and clear conversion process

Inactive Publication Date: 2017-02-01
NANJING UNIV OF SCI & TECH
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  • Application Information

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Problems solved by technology

Aiming at a high-precision electromechanical combined bandpass sigma-delta closed-loop detection method in the closed-loop detection method, the current existing structural design method is not clear, and the loop parameters are difficult to obtain

Method used

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  • Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method
  • Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method
  • Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method

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Embodiment

[0065] After the modeling and structure selection of steps 1 and 2 in the specific implementation, it is necessary to combine the actual gyroscope structure to obtain the parameters of the discrete-time sigma-delta closed-loop detection loop for the gyroscope.

[0066] Compared with the performance of the previous open-loop detection gyroscope, the present invention preliminarily designs the expected detection performance index of the gyroscope: the resolution is 0.001° / s, the range is plus or minus 200° / s, and the bandwidth is 200HZ. In the later stage, the performance of the detection system can be further improved by increasing the oversampling rate. Because the output noise of the gyroscope determines its resolution, there is a formula:

[0067] SNR m i n = 20 log ( 200 0.001 ) = 106 d B

[0068]...

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Abstract

The invention discloses a silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method. The loop structure of a silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop is difficultly designed, and loop parameters are difficultly acquired. A convenient and simple loop design and parameter acquisition method is designed and includes the steps: modeling a sigma-delta closed-loop detection circuit of a gyroscope; designing the structure of the sigma-delta closed-loop detection circuit according to discrete time of the gyroscope; acquiring parameters of the sigma-delta closed-loop detection circuit according to the discrete time of the gyroscope; transforming discrete time SDM (space division multiplex) to mechanical-electrical combined SDM; adjusting the parameters. The silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop is designed by the aid of a DSToolbox, stability of a whole system can be ensured, and high signal-to-noise ratio is achieved.

Description

technical field [0001] The invention relates to a loop design and parameter acquisition method, in particular to a silicon micro-gyroscope electromechanical combined with sigma-delta closed-loop detection loop design and parameter acquisition method. Background technique [0002] Silicon micro gyroscope is a kind of sensor used to measure the attitude or rotational angular velocity of moving objects, and it plays a huge role in both military and civilian applications. Silicon micro-angular rate sensor has the advantages of small size, light weight, high reliability, low cost, mass production, easy integration with electronic circuits, etc. Equipment and other military and civilian fields have a wide range of applications. [0003] The structure diagram of the silicon micro gyroscope as the basis of this patent is as follows figure 1 Shown is a typical Z-axis Coriolis gyroscope. The direction of the X-axis is its driving axis, and after cooperating with the driving interfa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/567
CPCG01C19/567
Inventor 苏岩祝云峰
Owner NANJING UNIV OF SCI & TECH