An antisymmetric parallel direct drive motion decoupling high precision servo platform

Abstract

The invention discloses an antisymmetric parallel connection direct drive motion decoupling high-precision servo platform. The antisymmetric parallel connection direct drive motion decoupling high-precision servo platform comprises a base, a movement flat plate, a first guide rail and a second guide rail; the first guide rail and the second guide rail are both fixed to the movement flat plate and are perpendicular to each other; the base is provided with a first slide rail parallel to the first guide rail and a second slide rail parallel to the second guide rail; the first slide rail and the second slide rail are each provided with a linear driving device in a matched manner; the first slide rail and the second guide rail are connected through a first slider; the second slide rail and the first guide rail are connected through a second slider; the linear driving device on the first slide rail drives the first slider to move so as to drive the movable flat plate to move in the X direction; and the linear driving device on the second slide rail drives the second slider to move so as to drive the movable flat plate to move in the Y direction, and therefore motion decoupling in the two movement directions of X and Y is achieved.

Description

technical field [0001] The invention relates to a motion servo platform, in particular to a two-degree-of-freedom antisymmetric parallel direct-drive motion decoupling high-precision servo platform. Background technique [0002] With the continuous development of science and technology and industrial technology, human creativity is constantly developing towards the microscopic field. In recent years, in the fields of intelligent micro-nano devices, microelectronics and ultra-precision machinery manufacturing, and precision measurement, ultra-precision servo technology has gradually become the core technology of emerging industries such as information storage, precision imaging, precision machinery manufacturing, and semiconductor equipment. There is an urgent need for systems and equipment that can position and operate at micron, submicron, or even nanometer precision. Therefore, establishing a high-precision motion servo platform has great theoretical and practical signifi...

AI Technical Summary

Problems solved by technology

[0003] The traditional tandem two-dimensional planar motion platform is mostly driven by a rotary motor plus a ball screw. The tandem platform converts the rotary motion into a linear motion by the bottom rotary motor through the screw, thereby driving the upper rotary drive motor and the plate to move together. , but this transmission method causes the load mass of the bottom rotating motor to be greater than that of the upper motor, which limits the further improvement of the positioning accuracy, speed and acceleration of the equipment, and there is an inherent asymmetry in the design

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