Material feeding tank and material feeding system of electron beam smelting furnace, and smelting method

A feeding system and feeding trough technology, applied in the field of semiconductor manufacturing, can solve the problems of increase, material scattering, unfavorable yield, etc., and achieve the effects of reducing speed, avoiding waste, and reducing operation steps.

Inactive Publication Date: 2017-02-15
宁波创润新材料有限公司
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] However, when the electron beam furnace in the prior art uses bulk materials for melting, a large amount of materials are scattered outside the cooling bed, which is not conducive to the improvement of the yield

Method used

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  • Material feeding tank and material feeding system of electron beam smelting furnace, and smelting method
  • Material feeding tank and material feeding system of electron beam smelting furnace, and smelting method
  • Material feeding tank and material feeding system of electron beam smelting furnace, and smelting method

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Embodiment Construction

[0037] It can be seen from the background art that when the electron beam furnace in the prior art adopts bulk materials for smelting, there is a problem that a large amount of materials are scattered outside the cooling bed. Combining with the electron beam furnace bulk material feeding process in the prior art, the reasons for material scattering are analyzed:

[0038] In the electron beam melting furnace in the prior art, when bulk materials are added, the materials are often fed through the rotary feeding barrel. Collide with each other, causing a large amount of material to scatter outside the cooling bed.

[0039] In addition, during the smelting process, the material quickly falls into the cooling bed. Due to the high smelting temperature, the material heats up violently, and the gas contained in the material is released, which will also cause the molten metal liquid to splash, which again causes boring waste and reduces the yield. .

[0040] Moreover, in the process ...

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Abstract

The invention relates to a material feeding tank and a material feeding system of an electron beam smelting furnace, and a smelting method. The material feeding tank comprises: a tank for placing a substance, wherein the material of the tank is the same as the substance; and a connection ring positioned at one edge of the tank, wherein the connection ring is used for connecting to a transmission device so as to install the tank into a material feeding box. According to the present invention, the tank and the connection ring form the material feeding tank, such that the bulk material feeding can be performed on the electron beam smelting furnace by using the material feeding box; the use of the bulk material vibration and feeding system in the prior art is eliminated; the material feeding speed is reduced, the collision of the material during the falling process is avoided, and the material scattering is avoided, such that the waste of the material is avoided, and the material smelting yield is improved; and the bulk material feeding is performed on the electron beam smelting furnace by using the material feeding tank, such that the material feeding speed is reduced, the material temperature increasing is retarded, the gas release is retarded, the splashing of the molten metal liquid is reduced, the waste of the material is reduced, and the yield is increased.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a feeding tank, a feeding system and a melting method of an electron beam melting furnace. Background technique [0002] Electron Beam Refine Furnace (EB furnace) is a vacuum melting equipment that uses the kinetic energy of high-speed moving electrons to convert heat energy as a heat source to melt metals into ingots. Due to the high vacuum degree and good purification effect of the EB furnace, it can remove high-density and low-density impurities at the same time, so it is widely used in the production of clean metals and plays an important role in the production of high-purity titanium and titanium alloys. [0003] There are two ways of feeding the electron beam melting furnace: horizontal feeding and vertical feeding, which vary according to the shape of the material. There can be bar material feeding system and bulk material vibrating feeder system at the same tim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22B9/22
Inventor 吴景晖姚力军杜全国
Owner 宁波创润新材料有限公司
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