Frequency point-adjustable THz wave modulator based on transistor with high electronic mobility
A high electron mobility, transistor technology, applied in instruments, nonlinear optics, optics, etc., can solve problems such as adjustment of frequency points that are difficult to modulate, limiting the application of terahertz wave modulators, etc.
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[0016] The present invention will be described in further detail below in conjunction with specific embodiments and accompanying drawings.
[0017] In this embodiment, a frequency point adjustable terahertz wave modulator based on high electron mobility transistors working in the 0.4-0.5THz frequency band is proposed, and its structure is as follows figure 1 , figure 2 As shown, it includes a sapphire substrate layer 1, a GaN buffer layer 2, an AlGaN barrier layer 3 stacked sequentially from bottom to top, and an ohmic metal layer 5 and a Schottky metal layer 6 arranged on the AlGaN barrier layer. The ohmic metal layer and the Schottky metal layer cover the isolation dielectric layer 4, the metamaterial layer 7 is arranged on the upper surface of the isolation dielectric layer 4, the ohmic metal layer is connected to the gate electrode 8, and the metamaterial layer is connected to the drain electrode 9 ; It is characterized in that the metamaterial layer 7 is formed by perio...
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