A rotating pecvd system

Abstract

The invention discloses a rotary PECVD system, which comprises an installation platform, on which a tube furnace is installed, a quartz tube is installed in the middle of the tube furnace, a screw feeder is arranged in the middle of the quartz tube, and a feeder is arranged at the feeding end of the quartz tube in turn. Gas system and feeding hopper, between the feeding hopper and the tube furnace, there is a rotating gear fixedly connected to the quartz tube, the rotating gear is connected to the DC motor, and the discharging end of the quartz tube is fixed with a discharging hopper and a vacuum unit in turn . The invention makes the transfer of mass and heat more favorable, and improves the uniformity of coating. Through the continuous rotation of the rotary furnace body, the particles continuously change positions and flip, and realize good contact with the reaction gas; the rotating speed of the rotary furnace is adjustable, so that It can change the movement state of particles in the furnace and adjust the gas-solid contact condition; finally achieve controllable, efficient and uniform coating coating; continuous operation can be realized by installing sealed hoppers for feeding and discharging materials on both sides of the rotary furnace.

Description

technical field [0001] The invention belongs to the field of PECVD, in particular to a rotating PECVD system. Background technique [0002] With the rapid development of machinery, microelectronics and other industrial fields, people put forward higher requirements for the performance of materials, and high strength, high electrical and thermal conductivity are one of the important directions. Due to the special two-dimensional structure of graphene and its excellent mechanical properties and electrical and thermal conductivity, it has become a research hotspot in the field of materials. One of the important directions is to add it to the metal matrix as a reinforcement, and it is expected to develop graphene with excellent properties. Reinforced metal matrix composites. However, the research on graphene-reinforced metal matrix composites is still in its infancy, there are few related reports, and related research work is urgently needed. Among them, how to uniformly dispe...

AI Technical Summary

Problems solved by technology

It is difficult to obtain graphene metal matrix composites by traditional smelting and metallurgy methods

At present, the preparation of graphene metal matrix composites mainly adopts the method of introducing graphene from the outside, so that graphene is embedded in the metal matrix as a reinforcing phase. The means of introducing graphene mainly include mechanical exfoliation of graphite and reduction of graphene oxide. , the composite powder of graphene metal matrix can be obtained by using these two methods, but it is difficult to solve the problem of dispersion uniformity

[0003] In situ self-generated graphene on the surface of metal particles to prepare graphene metal matrix composites is an effective means to solve the problem of uniform dispersion and ensure a certain interface bonding force, but the related research is still very rare.

The main considerations are: firstly, as a metal substrate, its biggest advantage lies in the preparation of large-area high-quality graphene films rather than small-sized graphene; secondly, metal particles are easily sintered at high temperatures and cannot Graphene is uniformly formed on the surface

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