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Temporary storage device and storage method of carrier

A temporary, carrier technology

Active Publication Date: 2019-09-24
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, there is a possibility that the transfer signal may not be output to the communication terminal due to an error in the overhead traveling vehicle

Method used

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  • Temporary storage device and storage method of carrier
  • Temporary storage device and storage method of carrier
  • Temporary storage device and storage method of carrier

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0045] exist Figure 1 to Figure 12 The temporary storage device (temporary storage device) 2 of the carrier according to the embodiment and its modifications are shown in . The temporary storage device 2 is installed in a clean room, etc., and is supported from the ceiling of the clean room image 3 The running rails 4 and 6 of the illustrated overhead traveling vehicle 30 (OHT) are processing devices such as semiconductors, and the processing devices include inspection devices and include one to a plurality of loading ports 16 . In addition, items such as semiconductor wafers and reticles are stored in a carrier 18 such as a FOUP (Front-Opening Unified Pod), temporarily stored in a slide buffer 12 and a fixed buffer 14, and are connected by an overhead traveling vehicle (OHT) 30 and 10 trolleys are transported on the spot.

[0046] The temporary storage device 2 is arranged on the passage 7 in the clean room at a height that does not interfere with people. The on-site tro...

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PUM

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Abstract

The invention provides a temporary storage device and a storage method for carriers. Even in the state where the elevated traveling vehicle fails and communication between the elevated traveling vehicle and the controller cannot be performed, interference between the elevated traveling vehicle and the ground trolley can be prevented. Temporarily store the carrier between the overhead trolley and the loading port. The existing trolley travels along the traveling guide rail of the existing trolley directly above the loading port under the traveling guide rail of the elevated trolley, and a plurality of buffer zones are provided. The elevated trolley communicates freely with the above-mentioned on-site trolley via the terminal and the controller, and the sensors that detect the components of the crane on the overhead trolley and the carrier being lifted are installed at a height that does not interfere with the on-site trolley. When a component or a carrier of a crane is detected, travel of the above-mentioned on-site trolley is restricted.

Description

technical field [0001] The present invention relates to temporary storage of carriers containing semiconductor wafers and the like. Background technique [0002] In order to increase the operating rate of semiconductor processing equipment, it is required to install a temporary storage device (buffer zone) near the loading port. Regarding this, the applicant proposed in Patent Document 1 (JP2012-111635) that it is parallel to a running rail of an overhead traveling vehicle (OHT: Overhead Hoist Transport) and that a running rail of a local trolley is provided below it. In addition, if the buffer zone that can be transferred by both the local trolley and the elevated trolley is provided at a part other than the travel guide rail of the local trolley and directly above the loading port, for example, four buffer zones can be provided. . In the case that the number of buffer zones is insufficient, consider adding a lateral conveying mechanism between the elevated trolley and th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCH01L21/67259H01L21/67733H01L21/67736H01L21/67769B65G2201/0297
Inventor 高井要
Owner MURATA MASCH LTD