Rotation error measuring apparatus of aerostatic spindle

A technology of aerostatic spindle and measuring device, which is applied in the field of precision measurement to achieve the effect of improving measurement accuracy

Active Publication Date: 2017-04-05
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] At present, the rotation error measurement device of the aerostatic spindle that uses the reverse method to realize the strict equality of the angles corresponding to the sampling points in the measurement data before and after the reverse has not been reported yet.

Method used

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  • Rotation error measuring apparatus of aerostatic spindle
  • Rotation error measuring apparatus of aerostatic spindle
  • Rotation error measuring apparatus of aerostatic spindle

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Embodiment Construction

[0022] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0023] like figure 1 As shown, the rotation error measuring device of the aerostatic spindle of the present invention includes an air-floating vibration isolation platform 1, a spindle mounting bracket 2, an aerostatic spindle 3, a sensing and measuring device 4, a moving guide rail 5, and a driving motor 6;

[0024] The connection relationship is: the air-floating vibration-isolation platform 1 is placed on the vibration-isolation foundation; the main shaft mounting bracket 2 is fixedly connected to the air-floating vibration-isolation platform 1; the air static pressure main shaft 3 is fixedly connected to the main shaft mounting bracket 2; the moving guide rail 5 Fixedly connected to the air-floating vibration-isolation platform 1; the sensing and measuring device 4 is fixedly connected to the moving guide rail 5, and the moving guide rail ...

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Abstract

The invention provides a rotation error measuring apparatus of an aerostatic spindle. A left-right differential thread mechanism, a front-rear differential thread mechanism, and an up-down differential thread mechanism of the apparatus are used for guaranteeing the distance between the equator line of a standard ball and a non-contact displacement sensor is 70 [mu]m to 80 [mu]m, a standard ball installation seat is used for realizing submicron eccentric adjustment of the standard ball and the rotation axis of the aerostatic spindle, a sensor installation support is used for realizing 180-degreee rotation positioning of the non-contact displacement sensor before and after reverse measurement, an index plate is used for realizing 180-degree rotation positioning of the standard ball before and after reverse measurement, and a circular grating and a reading head are used for realizing strict equivalence of angles corresponding to sampling points of measuring data before and after reverse direction. According to the rotation error measuring apparatus of the aerostatic spindle, the rotation errors of the aerostatic spindle and the roundness errors of the standard ball can be accurately separated, and the measuring precision of the rotation errors of the aerostatic spindle is improved.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a rotation error measuring device of an aerostatic spindle. Background technique [0002] With the continuous development of science and technology, ultra-precision machining technology directly reflects the basic industrial level of a country. The aerostatic spindle is an important functional component for ultra-precision cutting, and its rotation error will be directly mapped to the surface topography of the machined parts, thus restricting the improvement of the machining accuracy of ultra-precision cutting machine tools. Therefore, it is of great significance to carry out the measurement of the rotation error of the aerostatic spindle to promote the rapid development of ultra-precision machining technology. [0003] The rotation error of the aerostatic spindle is on the order of tens of nanometers, and the measurement difficulty lies in the separati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/00
CPCG01B21/00
Inventor 雷大江蓝河钱林弘崔海龙张连新王宝瑞阳红夏欢陈一郑越青
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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