Upper cover plate rubber ring leakage detection tool
An apron and leak detection technology, applied in the direction of using liquid/vacuum degree for liquid tightness measurement, etc., can solve the problems of increasing equipment leak detection time, parts replacement and assembly time, unqualified leak rate, etc., to improve leak detection efficiency , increase the success rate, the effect of simple structure
Inactive Publication Date: 2017-04-26
PIOTECH CO LTD
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Problems solved by technology
[0002] The assembly process of semiconductor equipment must ensure that the sealing performance of the rubber ring on the top cover meets the requirements of the equipment. If the leak is detected after all the rubber rings are installed on the equipment, uncertain factors will be added and the leakage rate may be unqualified. This will increase the leak detection time of the equipment and the replacement and assembly time of parts
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[0012] The technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0013] Such as figure 1 with figure 2 Shown: the upper cover rubber ring leak detection tool, including pipe joint 1, nozzle upper plate 2, ceramic ring 3, pressure plate 4 and bottom plate 5. The pipe joint 1 is fixed at the center of the upper end of the upper plate 2 of the nozzle and connected to the leak detector. The ceramic ring 3 is arranged between the upper plate 2 and the pressing plate 4 of the nozzle. The bottom plate 5 is arra...
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The invention provides relates to an upper cover plate rubber ring leakage detection tool which comprises a pipe joint, a sprayer upper plate, a ceramic ring, a pressing plate and a bottom plate. The pipe joint is fixed to the center of the upper end of the sprayer upper plate and is connected to a leakage detector. The ceramic ring is arranged between the sprayer upper plate and the pressing plate. The bottom plate is arranged under the pressing plate. A pressing plate to be detected is placed in the groove of the bottom plate. The upper cover plate rubber ring leak detection tool is suitable for any upper cover plate rubber ring whose diameter is smaller than the groove of the bottom plate, in a final leakage detection link, according to the device, the frequency of component disassembly can be reduced in a leakage detection process, and the smooth completion of a leakage detection link is helped.
Description
Technical field [0001] The invention relates to a leak detection tool, in particular to a leak detection tool for an upper cover plate rubber ring, belonging to the technical field of semiconductor equipment. Background technique [0002] The assembly process of semiconductor equipment must ensure that the sealing performance of the upper cover apron meets the requirements of the device. If the apron is fully installed on the device and then leak detection, it will increase the uncertainty and may cause the leakage rate to be unqualified. This will increase the leak detection time of the equipment and the replacement and assembly time of parts. Summary of the invention [0003] In view of the above-mentioned shortcomings of the prior art, the present invention provides an upper cover rubber ring leak detection tool that can reduce the leak detection time of the equipment and the time for replacing parts, while improving the reliability of the equipment. [0004] In order to achieve...
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IPC IPC(8): G01M3/02
Inventor 马壮朱佳奇
Owner PIOTECH CO LTD