Focused anode layer ion source device

A technology of anode layer and ion source, applied in the field of ion source, can solve the problems of limited cooling effect, affecting the life and effectiveness of ion source, etc., and achieve the effect of obvious cooling effect, increasing working time and reliability, and scientific and reasonable structure design.

Inactive Publication Date: 2017-05-10
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

However, the ion beams generated by this type of ion source are parallel. When the ion beam needs to be focused, this type of ion source is powerless. At the same time, in the

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[0019] The specific implementation manner of the present invention will be described in detail below in conjunction with specific examples.

[0020] Such as figure 1 As shown, the present invention discloses a focused anode layer ion source device, which includes a housing 18, which is hollow cylindrical and made of steel Q235-B material, which has a magnetic conduction effect. On the inner wall of the housing 18, an insulating sleeve 5 is provided, and the insulating sleeve 5 is made of polytetrafluoroethylene to ensure that the plasma and the housing 18 are kept insulated. On the outer wall of the housing 18 , a first water cooling system 7 is provided along the circumference of the outer wall of the housing 18 . The first water-cooling system includes a water inlet pipeline 27, an outlet pipeline 28, and a water-cooling tube 7 that is fixed between the inlet pipeline 27 and the outlet pipeline 28 and is fixed by spot welding with the casing 18. The first water-cooling syst...

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Abstract

The invention discloses a focused anode layer ion source device, which comprises a shell, wherein an anode ring and a cathode ring are oppositely arranged in the shell at an interval; an intake pipe is also fixedly arranged on the shell; the surfaces of the anode ring and the cathode ring are circular conical surfaces; the cathode ring comprises an outer cathode ring and an inner cathode ring; the outer cathode ring and the inner cathode ring are arranged in the same circular conical surface; and the conical surface of the anode ring is parallel to that of the cathode ring. The focused anode layer ion source device is scientific and reasonable in structure design; the anode ring and the cathode ring are set to be parallel circular conical surfaces, generated ion beams are focused towards the axis direction and the ion beams of which the sections are solid circles are formed within a distance range far away from the focusing point; the ion beam density is concentrated and the section uniformity is good; through a design of multiple groups of water-cooling systems, the cooling effect on a magnetic path and the inner cathode ring is ensured; the service life of the inner cathode ring can be prolonged; and the continuous high-intensity working time of the ion source is prolonged and the reliability of the ion source is strengthened.

Description

technical field [0001] The invention relates to the technical field of ion sources, in particular to a focusing type anode layer ion source device. Background technique [0002] The linear ion source was first successfully developed by Russian researchers. In the 1990s, the American AE company obtained the design principle of this technology and conducted in-depth research and product development, which not only greatly improved the linear ion source in terms of working performance. Great improvement, but also launched a number of series of improved products, such as basic type, multi-unit type and linear ion source and so on. This type of ion source has achieved great success in ion beam etching and cleaning of substrates, assisted thin film deposition and direct thin film deposition. However, the ion beams generated by this type of ion source are parallel. When the ion beam needs to be focused, this type of ion source is powerless. At the same time, in the prior art, the ...

Claims

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Application Information

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IPC IPC(8): H01J49/10H01J49/02H01J49/06
CPCH01J49/10H01J49/02H01J49/062
Inventor 肖更竭周晖赵栋才马占吉武生虎郑军徐嶺茂桑瑞鹏
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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