Production of a thin film reflector

A reflector and thin film technology, which is applied in the production field of thin film reflectors, can solve the problems of low reflectivity, limited useful temperature range of metal reflectors, etc.

Inactive Publication Date: 2017-05-10
VIVAMOS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These problems usually begin at temperatures below their melting point and result in lower reflectivity
For these reasons, the useful temperature range of metal reflectors is usually rather limited

Method used

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  • Production of a thin film reflector
  • Production of a thin film reflector
  • Production of a thin film reflector

Examples

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Embodiment Construction

[0048] Throughout the drawings, the same reference numerals are used for similar or corresponding elements.

[0049] In order to better understand the proposed technique, it may be useful first to give a brief overview of the potential uses and applications of thin-film reflectors according to the proposed technique.

[0050] For example, a thin film reflector according to any of the disclosed embodiments can be used as a component of a high temperature lamp.

[0051] According to another example, a thin film reflector as described in any of the embodiments may be used as part of a scintillator for X-ray applications. In this application, the thin film reflector provides the reflective function for the secondary photons in the reflective scintillator. Due to the excellent heat resistance of the proposed thin-film reflector, it will be able to withstand thermal shocks due to excessive heat applied during the production phase of said scintillator and / or during use of the scinti...

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Abstract

There is provided a thin film reflector, a method and an ALD-system for producing the thin film reflector. The method comprises the steps of providing (S1) a substrate comprising at least one type of material, and providing (S2) a thin film including a metallic compound on at least part of said substrate. The method also comprises the step of coating (S3) at least part of said thin film with a first barrier layer by applying Low Temperature Atomic Layer Deposition, LT-ALD, with at least one first material, and the step of providing (S4) a second barrier layer on at least part of said first barrier layer by applying High Temperature Atomic Layer Deposition, HT-ALD, with at least one second material to thereby obtain a multi-layered thin film reflector. There is also an ALD control system for controlling the ALD-system. There is furthermore provided a computer program for controlling the temperature to be used by an ALD-tool. Particular uses of the provided thin film are also disclosed.

Description

technical field [0001] The proposed technology relates to a method for producing thin film reflectors and an atomic layer deposition ALD system for producing thin film reflectors, a control system for the ALD system, and a computer program for controlling the ALD system, and the thin film reflectors. Background technique [0002] Reflectors are used in a wide variety of applications, and they can be produced in a variety of different ways. The reflective metals in reflector applications are typically aluminum or silver for the visible wavelength range, and gold for infrared wavelengths. Since the metal layers corrode and are mechanically weak, they require some form of protection to remain reflective over time. [0003] The two ways of producing reflectors are the first surface mirror method and the second surface mirror method. The second surface mirrors have a thick glass or polymer sheet on top of the metal layer to protect them mechanically. This way, the protective f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/36C23C16/455G02B5/08
CPCG02B5/08C23C16/45555C23C28/321C23C28/34C23C28/345C23C28/3455G02B5/0858C23C16/303C23C16/305C23C16/40G02B1/14C23C16/0272C23C16/45527C23C16/52G02B5/0808G02B5/085
Inventor 安娜·萨尔霍尔姆塔帕尼·阿拉萨雷拉
Owner VIVAMOS LTD
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