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Methods for detecting particulate radiation

A technology of particles and detectors, applied in radiation measurement, X/γ/cosmic radiation measurement, measurement devices, etc., can solve problems such as no proof of resolution

Active Publication Date: 2022-05-17
FEI CO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The method has not been demonstrated to give results for resolutions other than half a detector pixel or whole detector pixel(s)

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  • Methods for detecting particulate radiation

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Embodiment Construction

[0013] The inventors found that the response of detector pixels to colliding particles not only depends on the different responses between pixels (inter-pixel variance or inter-pixel inhomogeneity), but also that the particles are assigned to the detected The probability of position on a detector pixel (position-dependent bias) is non-uniform: the position-dependent bias (reproducibly) depends on position on a detector pixel and thus introduces intra-pixel inhomogeneities).

[0014] This can be explained as follows: Assuming that the extent of the cloud of electron / hole pairs is smaller than the pixel size, then if adjacent detector pixels show no electron / hole pairs (all electron / hole pairs are generated in one detector pixel ), this position will be assigned to the middle of the detector pixel, and since there is no ground to assign it to another position. Only when a particle hits near the boundary between two detector pixels (thus causing electron / hole pairs in both detect...

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Abstract

The present invention discloses a method for detecting particulate radiation. When particle radiation such as electrons is detected with a pixelated detector, a cloud of electron / hole pairs is formed in the detector. Using the signal caused by this cloud of electron / hole pairs, the location of the impact is estimated. The inventors found that when the size of the cloud is comparable to or much smaller than the pixel size, the estimated position shows a strong bias to the center and corner of the pixel, and to the middle of the boundary. This hinders formation of an image with super-resolution. By shifting position or by assigning electrons to several sub-pixels, this bias can be counteracted, resulting in a more realistic representation. The inventors also found that by expanding the image, the Moire effect and interference in the image can be canceled out. This expansion is a reversible process as long as the image is sparse (nearly all pixels represent a bump or no bump). After expansion (effectively, spatial low-pass filtering), high-pass filtering can be used to homogenize the image.

Description

technical field [0001] The present invention relates to a method of detecting particulate radiation using a semiconductor-based pixelated detector, the detector pixels having the size of a detector pixel, the detector being sensitive to particulate radiation, each particle radiating particle ) results in a number of electron / hole pairs in the semiconductor material of the detector, the number of electron / hole pairs having a centroid and a centroid extent (centroid extent), the extent of the centroid being greater than the detector pixel size, the method comprising: [0002] the step of intercepting particles of particulate radiation, [0003] the step of estimating the number of electron / hole pairs for a number of adjacent detector pixels, [0004] the step of estimating the position of the centroid of said number of electron / hole pairs using estimates of electron / hole pairs in neighboring detector pixels, [0005] the step of using said estimated centroid location to estima...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01T1/29
CPCG01T1/29G01T1/2978G01T1/247H01L27/14659H04N25/48H04N25/75G06T3/4069
Inventor B·J·詹斯森E·M·弗兰肯M·库伊珀L·于
Owner FEI CO