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Capacitance type micro displacement sensor detection circuit

A displacement sensor and detection circuit technology, applied in instruments, measuring devices, electrical devices, etc., can solve the problem of nonlinear output characteristics of variable-gap capacitance displacement sensors, and achieve strong anti-stray capacitance and anti-interference capabilities. Effect

Inactive Publication Date: 2017-05-31
史树元
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Problems solved by technology

[0004] The invention designs a capacitive micro-displacement sensor detection circuit, which solves the nonlinear problem of the output characteristics of the variable-gap capacitive displacement sensor

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  • Capacitance type micro displacement sensor detection circuit
  • Capacitance type micro displacement sensor detection circuit
  • Capacitance type micro displacement sensor detection circuit

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Embodiment Construction

[0022] exist figure 1 Among them, the detection circuit of the capacitive micro-displacement sensor includes a sinusoidal excitation source circuit, a capacitance detection circuit, a precision full-wave rectification circuit, and a gain filter circuit. The sinusoidal excitation source signal is applied to the sensor, and the voltage proportional to the change of the plate spacing is output through the capacitance detection circuit, and the DC component of the changing voltage is taken out through the precision full-wave rectification circuit and the gain filter circuit, which is proportional to the capacitance of the sensor electrode. board spacing.

[0023] exist figure 2 Among them, the sinusoidal excitation source circuit uses an active crystal oscillator to provide an excitation signal with stable frequency, and the voltage feedback stabilization link is designed to keep the amplitude of the excitation signal stable, and the 100kHz sinusoidal excitation is used to reduc...

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Abstract

The invention provides a capacitance type micro displacement sensor detection circuit which comprises a sinusoidal excitation source circuit, a capacitance detection circuit, a precision full-wave rectifier circuit, and a gain filter circuit. A sinusoidal excitation source signal is exerted onto the sensor and through the capacitance detection circuit, the voltage proportional to the variation of polar plate spacing is outputted. Through the precision full-wave rectifier circuit and the gain filter circuit, the direct current components of the varied voltage are extracted wherein the direct current components are proportional to the polar electrode spacing of the capacitance sensor. The circuit of the invention solves the non-linear problem of the output characteristics of a variable-gap capacitive displacement sensor. The outputted voltage of the circuit is proportional to the displacement of the probe of the sensor, and has a very strong ability against stray capacitance and interference.

Description

technical field [0001] The invention relates to a sensor detection circuit, in particular to a capacitive micro-displacement sensor detection circuit. Background technique [0002] Capacitive displacement sensors have the advantages of non-contact measurement, simple structure, high precision, good dynamic characteristics and wide frequency band, and are widely used in industrial production and scientific research. [0003] At present, there is a large gap between domestic and foreign countries in the research of microcapacitive sensor processing circuits. In the field of research abroad, represented by the Integrated Sensor and Integrated Circuit Center of the University of Michigan in the United States, the monolithic integrated microcapacitance sensing system developed by them can detect various parameters of temperature, humidity, air pressure and acceleration. Each of the sensors adopts a sensitive capacitive structure. The meteorological intelligent measurement syste...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
Inventor 史树元
Owner 史树元
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