Imprinting roller in nano imprinting device and nano imprinting device

A technology of nano-imprinting and roller, which is applied in the field of nano-imprinting and can solve the problems of uneven pressure on the imprinting template

Active Publication Date: 2017-05-31
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide an imprinting roller in a nanoimprinting device and a nanoimprinting device. The roller body of the imprinting roller is filled

Method used

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  • Imprinting roller in nano imprinting device and nano imprinting device
  • Imprinting roller in nano imprinting device and nano imprinting device
  • Imprinting roller in nano imprinting device and nano imprinting device

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] An embodiment of the present invention provides an imprint roller in a nanoimprint device, such as Figure 1a as well as Figure 1b ( Figure 1a As shown in the sectional view along the OO' direction), the embossing roller 01 includes a roller shaft 10 and a roller body 20 sleeved on the roller shaft 10, and the roller body 20 is pushed to roll by the roller shaft 10 to carry out the embossing operation. The roller body 20 includes: an inner surface 201...

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Abstract

The embodiment of the invention provides an imprinting roller in a nano imprinting device and the nano imprinting device, and relates to the technical field of nano imprinting. A roller body of the imprinting roller is filled with gas, and a pressure surface is made of a flexible material, so that the problem that an imprinting template is pressed unevenly in an imprinting process can be solved. The imprinting roller in the nano imprinting device comprises a roller shaft and the roller body sleeving the roller shaft, wherein the roller body comprises an inner side surface connected with the roller shaft, the pressure surface used to contact a to-be-pressed object, and a connecting surface for connecting the inner side surface and the pressure surface, a cavity formed by the inner side surface, the connecting surface and the surface pressure is filled with gas, and the pressure surface is made of a flexible material.

Description

technical field [0001] The invention relates to the technical field of nanoimprinting, in particular to an embossing roller in a nanoimprinting device and a nanoimprinting device. Background technique [0002] With the development of the semiconductor industry towards the continuous reduction of feature size, nanoimprint lithography (NanoimprintLithography, NIL) has attracted more and more attention. Compared with the traditional photolithography method that requires expensive light sources and projection optical systems to form patterns, nanoimprinting can realize pattern transfer by pressing the imprint template, which greatly reduces the cost. [0003] The devices used in the existing nanoimprint technology generally include pneumatic devices and rolling devices. Among them, for pneumatic devices, a larger air pressure is required, especially for large-sized electronic products, the pressure required for general air pressure reaches 3.5×10 5 N can complete the transfer ...

Claims

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Application Information

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IPC IPC(8): G03F7/00B82Y40/00
CPCB82Y40/00G03F7/0002
Inventor 王英涛姚继开
Owner BOE TECH GRP CO LTD
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