The utility model relates to the field of nanoimprint, in particular to a rolling device for nanoimprint, which comprises a
workbench, a rolling mechanism is arranged at the top of the
workbench, the rolling mechanism comprises a support, a first transverse plate is connected to the top of the support, a hydraulic rod is fixedly arranged on one side of the first transverse plate, and the hydraulic rod is connected to the top of the
workbench. A second transverse plate is fixedly connected to the output end of the hydraulic rod, a
stroke groove is formed in the side wall of the first transverse plate, a displacement block is movably connected into the
stroke groove, and a connecting rod is fixedly connected to the side wall of the displacement block; the rolling mechanism is in inclined plane contact with the rollers on the rolling mechanism, the rollers are driven by lifting of the hydraulic rods to move up and down, and the impressing film plate is gradually attached to the
wafer during contact, so that the rollers roll the impressing film plate, the rolling device can provide a stable impressing environment and a repeatable impressing result, the consistency and quality of production are ensured, and the production efficiency is improved. And the rolling device can provide highly accurate
pressure control and uniform impressing force, so that accurate
processing and impressing of a nanoscale structure are realized.