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337results about How to "Improve thermal stress" patented technology

Method and arrangement for cleaning optical surfaces in plasma-based radiation sources

The invention is directed to a method and an arrangement for cleaning optical surfaces of reflection optics which are arranged in a plasma-based radiation source or exposure device arranged downstream and contaminated by debris particles emitted by a hot plasma of the radiation source. It is the object of the invention to find a novel possibility for in-situ cleaning of the optical surfaces of reflection optics which are contaminated by debris in plasma-based radiation sources so as to allow an integrated generation of known gas radicals and the isotropic distribution thereof on the contaminated optical surfaces. According to the invention, this object is met in that the gas radicals are generated by dielectrically impeded discharge between two surface electrodes along the entire optical surface. The gas radicals are generated almost exclusively by electron transfer on at least one barrier layer which covers the entire surface of at least one of the surface electrodes, an AC voltage in the Hz to kHz range is applied to the surface electrodes for periodically eliminating the charge polarization at the barrier layer so that a cold plasma is generated continuously and the deposited debris particles are removed as gaseous reaction products by the gas flow guided over the optical surface.
Owner:USHIO DENKI KK

Device and method for testing explosion properties of flammable gases at ultralow temperature

ActiveCN104749218AEasy temperature controlAvoid risks and excessive heat stressMaterial exposibilityStrain gaugeFlammability limit
The invention relates to a device and a method for testing the explosion properties of flammable gases at ultralow temperature. The device comprises a refrigerating device, an explosion vessel with a length-diameter ratio of 3 to 1 is arranged in an inner cavity of the refrigerating device, a gap is formed between the explosion vessel and the inner cavity of the refrigerating device, and a heat conducting material by which the temperatures of the explosion vessel and gas in the explosion vessel are reduced to an experimental temperature is added in the gap; the top of the explosion vessel is sealed by a blind flange, two ignition electrodes connected with an ignition energy console are arranged in the explosion vessel, the bottom of the explosion vessel is provided with a liquid outlet for implementing the cleaning of deposited carbon in the explosion vessel, and a strain gage for carrying out real-time monitoring on heat stress produced in the process of explosion is attached to the inner wall of the explosion vessel; and the blind flange is provided with a temperature sensor, a pressure sensor, a gas inlet and a gas outlet, and the gas inlet and the gas outlet are communicated with the inside of the explosion vessel. The device disclosed by the invention can be used for eliminating the trouble that the application amount of liquid nitrogen in liquid-nitrogen refrigerating is huge, and avoiding the occurrence of risks and ultra-high heat stress caused by the rapid evaporation of liquid nitrogen due to heat produced by explosion; and the device is high in refrigeration efficiency, and can meet the requirements on minimum ignition energy and explosion limit tests.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Welding deformation control aid of large-size stainless steel cylinder and welding deformation control method

The invention relates to a welding deformation control aid of a large-size stainless steel cylinder, comprising an inner arc flat panel, an outer arc flat panel and jack screws, wherein the inner arc flat panel and the outer arc flat panel are flat panels one side of which is an arc side, and the arc radiuses of the arc sides are the same as that of the cylinder; the jack screws are fixedly connected to both sides of points of the plat panels opposite to a longitudinal welding line of the cylinder; and the top ends of the jack screws face towards the arc sides of the plat panels. When in use, the assembly datum lines of the inner circumference and the outer circumference of the cylinder are drawn out on a welding platform, and the arc segment of the cylinder is hung on the platform and takes the places according to the datum lines; the lengths and the angles of a non-line length segment at both sides of the longitudinal line under a free state are measured, and the aid is selected according to the non-line lengths and the angles; the aid is spot welded on the cylinder, and the longitudinal line of the cylinder is alternately welded; and the welding order and the jack screws on the aid are adjusted according to the deformation condition of the longitudinal line. The invention has the advantages that the working procedures of mechanical shape correction and the hot shape correction after welding of the cylinder are avoided; the deformation in a welding process can be directly observed and regulated by taking technical measures; and the aid has simple structure and use method.
Owner:CHINA FIRST HEAVY IND +1

Low-temperature glass solder bonding and encapsulating method based on disc level glass micro-chamber

The invention discloses a low-temperature glass solder bonding and packaging method based on wafer-level glass microcavities, which comprises the following steps: firstly, utilizing a silk-screen printing process to coat low-temperature glass solder on a packaging contact part of a Pyrex7740 glass substrate provided with a microcavity structure, preliminarily drying the low-temperature glass solder, and making the low-temperature glass solder be cured and cling to the Pyrex7740 glass substrate provided with the microcavity structure; secondly, aligning a Pyrex7740 glass packaging wafer which is cured with the low-temperature glass solder and a silicon substrate wafer comprising an MEMS device or a CMOS circuit, and making the microcavity structure on the Pyrex7740 glass substrate correspond to the position of the MEMS device or the CMOS circuit to be packaged of a silicon substrate; and thirdly, using a clamper to firmly clamp the two aligned wafers, applying the pressure, sintering the glass solder in a specified packaging atmosphere, and cooling the glass solder. The whole process is based on integral processing of the silicon wafer and the Pyrex7740 glass wafer, belongs to a process for manufacturing and packaging a wafer-level MEMS, and has the characteristics of simple method, adjustable packaging space and low cost.
Owner:SOUTHEAST UNIV
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